Patents Assigned to Systems Technology, Inc.
  • Method of fabricating a diaphragm of a capacitive microphone device
    Patent number: 7585417
    Abstract: A method of fabricating a diaphragm of a capacitive microphone device is provided. First, a substrate is provided, and a dielectric layer is formed on a first surface of the substrate. Than, a plurality of silicon spacers are formed on a surface of the dielectric layer, and the dielectric layer is patterned to form a plurality of dielectric bumps. Subsequently, a diaphragm layer is formed on a surface of the silicon spacers, a surface of the dielectric bumps, and the first surface of the substrate so that the diaphragm layer has a corrugate structure by virtue of the dielectric bumps. Thereafter, a planarization layer is formed on the diaphragm layer, and a second surface of the substrate is etched to form a plurality of openings corresponding to the corrugate structure. Following that, the dielectric bumps exposed through the openings are removed, and the planarization layer is removed.
    Type: Grant
    Filed: June 23, 2006
    Date of Patent: September 8, 2009
    Assignee: Touch Micro-System Technology Inc.
    Inventor: Hsien-Lung Ho
  • Method for wafer level chip scale packaging with passive components integrated into packaging structure
    Patent number: 7582511
    Abstract: The present invention provides a Wafer Level Chip Scale Packaging structure including a die, at least one passive component, a combining layer, an isolating layer, at least one connecting wire, an internal pad and a passivation layer. The die includes a shallow connecting pad, an internal pad and an electrical component. The passive component is formed on one side of the die. The combining layer increases the binding force between the passive component and the die. The part surface on the other side of the die is overlaid with the isolation layer. The part surface of the isolation layer and the internal pad is overlaid with the connecting wire to electrically connect to the internal pad, and the passivation layer is used for protecting the die.
    Type: Grant
    Filed: May 17, 2006
    Date of Patent: September 1, 2009
    Assignee: Touch Micro-System Technology Inc.
    Inventor: Chen Hsiung Yang
  • Method of performing a double-sided process
    Patent number: 7566574
    Abstract: A method of performing a double-sided process is provided. First, a wafer having a structural pattern disposed on the front surface is provided. Following that, a plurality of front scribe lines are defined on the structural pattern, and a filling layer is filled into the front scribe lines. Subsequently, the structural pattern is bonded to a carrier wafer with a bonding layer, and a plurality of back scribe lines are defined on the back surface of the wafer. Finally, the filling layer filled in the front scribe lines is removed.
    Type: Grant
    Filed: September 6, 2007
    Date of Patent: July 28, 2009
    Assignee: Touch Micro-System Technology Inc.
    Inventor: Chen-Hsiung Yang
  • FILAMENT ASSEMBLY HAVING REDUCED ELECTRON BEAM TIME CONSTANT
    Publication number: 20090129550
    Abstract: A filament assembly for use in an x-ray emitting device or other filament-containing device is disclosed. In one embodiment, an x-ray tube is disclosed, including a vacuum enclosure that houses both an anode having a target surface, and a cathode positioned with respect to the anode. The cathode includes a filament assembly for emitting a beam of electrons during tube operation. The filament assembly comprises a heat sink and a plurality of filament segments. The filament segments are configured for simultaneous emission of an electron beam for impingement on the target surface of the anode, and are electrically connected in series. Each filament segment includes first and second end portions that are thermally connected to the heat sink, and a central portion that can be configured with a modified work function for preferential electron emission.
    Type: Application
    Filed: November 19, 2007
    Publication date: May 21, 2009
    Applicant: Varian Medical Systems Technologies, Inc.
    Inventors: Steve G. Bandy, Gary F. Virshup, Michael Curzon Green, James Russell Boye, Dennis Runnoe, Robert Clark Treseder, David Humber
  • X-RAY TUBE HAVING A FOCAL SPOT PROXIMATE THE TUBE END
    Publication number: 20090129549
    Abstract: An x-ray tube having a reduced spacing between the focal spot of an anode and an adjacent end wall of an evacuated enclosure is disclosed. This in turn positions the tube relatively closer to the chest wall of a patient during mammography procedures. In one embodiment, the x-ray tube comprises an evacuated enclosure having first and second ends interconnected by a cylindrical side wall. The evacuated enclosure includes a rotor assembly having a bearing assembly and a stem. An anode is rotatably supported by the stem of the rotor assembly and includes a target surface and an opposite second surface. The target surface is positioned to face the bearing assembly, while the second surface is positioned to face the first end of the evacuated enclosure, with no intervening structure interposed therebetween. A cathode is included to emit electrons for impingement on a focal spot of the focal track.
    Type: Application
    Filed: November 21, 2007
    Publication date: May 21, 2009
    Applicant: Varian Medical Systems Technologies, Inc.
    Inventor: Gary Fredric Virshup
  • Micro sample heating apparatus and method of making the same
    Patent number: 7533564
    Abstract: A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having a vertical sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the second surface of the substrate. The isolation structure has an opening corresponding to the cavity, and the cavity and the opening form a sample room.
    Type: Grant
    Filed: May 2, 2006
    Date of Patent: May 19, 2009
    Assignee: Touch Micro-System Technology INC.
    Inventors: Chin-Chang Pan, Yu-Fu Kang
  • Method of fabricating suspended structure
    Patent number: 7531457
    Abstract: A method of fabricating a suspended structure. First, a substrate including a photoresist layer hardened by heat is provided. Subsequently, the hardened photoresist layer is etched so as to turn the photoresist layer into a predetermined edge profile. Thereafter, a structure layer is formed on parts of the substrate and parts of the photoresist layer. Next, a dry etching process is performed so as to remove the photoresist layer, and to turn the structure layer into a suspended structure.
    Type: Grant
    Filed: November 21, 2006
    Date of Patent: May 12, 2009
    Assignee: Touch Micro-System Technology Inc.
    Inventors: Yu-Fu Kang, Chen-Hsiung Yang
  • Method of fabricating optical device caps
    Patent number: 7528000
    Abstract: A wafer having a plurality of through holes is provided, and a glass wafer is disposed on the wafer. A plate having a plurality of concave cavities is disposed on the glass wafer, wherein the concave cavities corresponding to the through holes of the wafer so that a part of the plate corresponding to the through holes is not in contact with the glass wafer. A voltage source is provided, and two electrodes thereof respectively have electrical connections to the wafer and the plate. The wafer and the glass wafer are bonded to each other by the anodic bonding method so that a plurality of optical device caps are formed.
    Type: Grant
    Filed: April 16, 2007
    Date of Patent: May 5, 2009
    Assignee: Touch Micro-System Technology Inc.
    Inventor: Chun-Wei Tsai
  • Volumetric X-ray imaging system with automatic image resolution enhancement
    Patent number: 7526065
    Abstract: An automated X-ray imaging system and method for producing a plurality of X-ray imaging signals having selectively enhanced volumetric image resolutions, e.g., for magnifying the field of view and providing a volumetric display image having features not otherwise visible to an unaided human eye. Successive doses of X-ray radiation are applied to a portion of the subject to produce corresponding volumetric image signals. Such doses of X-ray radiation are controlled by controlling X-ray radiation characteristics, such as intensity, focal spot size, focal spot location, focal spot shape, or collimation, to cause a subsequent volumetric image signal to differ from a prior volumetric image signal in one or more volumetric image characteristics, such as volumetric image resolution.
    Type: Grant
    Filed: April 14, 2005
    Date of Patent: April 28, 2009
    Assignee: Varian Medical Systems Technologies, Inc.
    Inventor: Dan Hardesty
  • SYSTEM, METHOD AND APPARATUS FOR MANAGEMENT OF SIMULATIONS
    Publication number: 20090106003
    Abstract: A method for managing a computer simulation is disclosed. The method includes providing an interface for soliciting input of initialization parameters for generating a training exercise and receiving from the interface initialization parameters entered by a user. The method further includes executing the training exercise defined by the initialization parameters and providing a second interface for soliciting input of execution parameters for managing execution of the training exercise. The method further includes receiving from the second interface execution parameters entered by a user and modifying execution of the training exercise as defined by the execution parameters. The method further includes storing performance data associated with performance of participants during execution of the training exercise and providing a third interface that provides a summary of the performance data.
    Type: Application
    Filed: October 23, 2008
    Publication date: April 23, 2009
    Applicant: UNIVERSAL SYSTEMS AND TECHNOLOGY, INC.
    Inventor: Daniel Lawrence Diehl
  • USEFUL IMPROVEMENTS IN THE ART OF 3-PHASE ELECTRONIC TAP CHANGER COMMUTATION DEVICE
    Publication number: 20090102438
    Abstract: The invention is for a 3-phase electronic tap changer commutation device to be utilized in electronic regulators, and more particularly to 3-phase alternating current (AC) electronic tap-changing voltage, current or phase correcting regulators. The present invention provides a specific transformer winding topology and commutation technique that improves performance and reduces cost compared to conventional methods.
    Type: Application
    Filed: October 24, 2008
    Publication date: April 23, 2009
    Applicant: Utility Systems Technologies, Inc.
    Inventors: Steven M. Raedy, Doug Marble, Erick Singleman
  • Method of forming a cavity by two-step etching and method of reducing dimension of a MEMS device
    Patent number: 7514287
    Abstract: A method for reducing dimension of an MEMS device. A single crystalline substrate having a diaphragm is provided. A first-step anisotropic dry etching process is performed to form an opening corresponding to the diaphragm in the back surface, the anisotropic dry etching stopping on a specific lattice plane extending from the edge of the diaphragm. A second-step anisotropic wet etching process is performed to etch the single crystalline substrate along the specific lattice plane until the diaphragm is exposed to form a cavity having a diamond-like shape.
    Type: Grant
    Filed: March 15, 2006
    Date of Patent: April 7, 2009
    Assignee: Touch Micro-System Technology Inc.
    Inventors: Ter-Chang Huang, Hung-Yi Lin, Wen-Syang Hsu
  • X-RAY TUBE COOLING SYSTEM
    Publication number: 20090086917
    Abstract: X-ray tube cooling systems. In one example embodiment, an x-ray tube includes a housing, a window frame attached to the housing, and a window attached to the window frame. The housing defines an aperture through which electrons can pass from a cathode to an anode. The housing also defines an inlet port and an outlet port. The window frame defines an opening through which x-rays can pass. The window covers the opening defined by the window frame. The housing and the window frame are configured such that a liquid can flow from the inlet port to the outlet port through either a first liquid path at least partially defined by the housing or a second liquid path cooperatively defined by the housing and the window frame. The second liquid path is disposed about at least a portion of the opening in the window frame.
    Type: Application
    Filed: February 8, 2008
    Publication date: April 2, 2009
    Applicant: VARIAN MEDICAL SYSTEMS TECHNOLOGIES, INC
    Inventors: Don Lee Warburton, Jason W. Davies, Gregory C. Andrews
  • LIQUID COOLED WINDOW ASSEMBLY IN AN X-RAY TUBE
    Publication number: 20090086922
    Abstract: Liquid cooled window assembly for an x-ray tube. In one example embodiment, an x-ray tube window assembly includes an x-ray tube window frame that defines an opening and an x-ray tube window configured to be attached to the x-ray tube window frame. When the x-ray tube window is attached to the x-ray tube window frame, the x-ray tube window substantially covers the opening defined by the x-ray tube window frame, and the x-ray tube window cooperates with the x-ray tube window frame to define a fluid passageway disposed about at least a portion of the opening. The fluid passageway includes an inlet and an outlet.
    Type: Application
    Filed: September 28, 2007
    Publication date: April 2, 2009
    Applicant: VARIAN MEDICAL SYSTEMS TECHNOLOGIES, INC.
    Inventor: Don Lee Warburton
  • SYSTEMS AND METHODS FOR ASSOCIATING PHYSIOLOGICAL DATA WITH IMAGE DATA
    Publication number: 20090088622
    Abstract: A method of processing image data that includes obtaining image data, determining a phase of a respiratory cycle, and associating the image data with the determined phase within 60 seconds, and more preferably, within 15 seconds, after the image data is obtained. A system for processing image data that includes a processor configured for obtaining image data, determining a phase of a respiratory cycle, and associating the image data with the determined phase within 60 seconds, and more preferably, within 15 seconds, after the image data is obtained. A method of processing image data that includes obtaining image data during an image acquisition session, determining a phase of a respiratory cycle, and associating the image data after the image data is obtained but before the image acquisition session is completed.
    Type: Application
    Filed: September 28, 2007
    Publication date: April 2, 2009
    Applicant: VARIAN MEDICAL SYSTEMS TECHNOLOGIES, INC.
    Inventor: Hassan MOSTAFAVI
  • ANALYTICAL X-RAY TUBE FOR CLOSE COUPLED SAMPLE ANALYSIS
    Publication number: 20090086898
    Abstract: An x-ray device and method useful in performing close coupled sample analyses. The x-ray device includes an evacuated enclosure having a window and in which is disposed a cathode assembly, control grid, insulator, and anode arranged so that the anode is interposed between the electron source and the window. The anode includes a target surface oriented toward the window and the anode defines a drift tunnel which is substantially aligned with a hollow defined by the insulator. The control grid can be used to influence the energy of the electrons emitted by the filament of the cathode assembly. A high voltage field between the anode and filament causes electrons emitted by the cathode to accelerate rapidly through the insulator. After accelerating to an energy level consistent with the high voltage field, the electrons then pass through the drift tunnel without gaining any additional appreciable energy.
    Type: Application
    Filed: September 27, 2007
    Publication date: April 2, 2009
    Applicant: Varian Medical Systems Technologies, Inc.
    Inventors: John E. Richardson, Robert Clark Treseder
  • Method for wafer level packaging and fabricating cap structures
    Patent number: 7510947
    Abstract: A cap wafer with patterned film formed thereon is etched through areas not covered by the patterned film to form a plurality of openings. Then, the cap wafer is bonded to a transparent wafer, and the cap wafer around the pattern film is segmented to form a plurality of cap structures. A device wafer with a plurality of devices and a plurality of contact pads electrically connected to the devices is subsequently provided. The cap structures and the device wafer are hermetically sealed to form a plurality of hermetic windows on the devices.
    Type: Grant
    Filed: July 3, 2006
    Date of Patent: March 31, 2009
    Assignee: Touch Micro-System Technology Inc.
    Inventors: Shih-Feng Shao, Ming-Yen Chiu
  • Light emitting diode structure and manufacturing method thereof
    Patent number: 7510892
    Abstract: A light emitting diode structure has a silicon substrate, a conductive layer, and a light emitting diode. The top surface of the silicon substrate has a cup-structure like paraboloid, and the bottom of the cup-structure has a plurality of through-holes penetrating the silicon substrate. The conductive layer fills up the through-holes and protrudes out from the through-holes. The light emitting diode is disposed on the top of the conductive layer protruding out from the through-holes and is located at the focus of the cup-structure.
    Type: Grant
    Filed: April 18, 2007
    Date of Patent: March 31, 2009
    Assignee: Touch Micro-System Technology Inc.
    Inventors: Hung-Yi Lin, Hong-Da Chang
  • Vapor recovery system with improved ORVR compatibility and performance
    Patent number: 7509982
    Abstract: A fueling and associated vapor recovery system maintains the same, or lower, vacuum level in the vapor hose during ORVR vehicle refueling as that seen during a non-ORVR refueling. A valve assembly is made as either a part of the end of the vapor recovery hose assembly, a separate unit that is placed between the hose assembly and the nozzle, or incorporated directly into the nozzle. The valve assembly is biased to one position by a spring to which is attached a sliding valve member. The force of the spring is sufficient to keep the valve member in the original position when refueling non-ORVR vehicles so that the vapor hose is unobstructed and an air bleed hole is closed. When refueling an ORVR vehicle, the elevated vacuum level moves the valve member to a second position which blocks off the vapor hose from the vacuum pump and opens up the vapor hose to the air bleed hole.
    Type: Grant
    Filed: February 8, 2007
    Date of Patent: March 31, 2009
    Assignee: Vapor Systems Technologies, Inc.
    Inventor: Rodger P. Grantham
  • APERTURE SHIELD INCORPORATING REFRACTORY MATERIALS
    Publication number: 20090080617
    Abstract: An x-ray tube electron shield is disclosed for interposition between an electron emitter and an anode configured to receive the emitted electrons. The electron shield is configured to withstand the elevated levels of heat produced by electrons backscattered from the anode and incident on the electron shield. This in turn equates to a reduced incidence of failure in the electron shield. In one embodiment the electron shield includes a body that defines a bowl-shaped aperture having a narrowed throat segment. The body of the electron shield includes a first body portion, a second body portion, and a disk portion. These portions cooperate to define the bowl and the throat segment. The throat segment and the lower portion of the bowl are composed of a refractory material and correspond with the regions of the electron shield that are impacted by relatively more backscattered electrons from the anode surface.
    Type: Application
    Filed: September 25, 2007
    Publication date: March 26, 2009
    Applicant: Varian Medical Systems Technologies, Inc.
    Inventor: Gregory Andrews