Patents Assigned to T-Robotics Co., Ltd.
  • Patent number: 12278132
    Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, each compartmentalized into a lower and an upper space, wherein link connecting members with blades are engaged at front and rear areas of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes, and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms, multiple subordinate link arms and a common link arm that are connected to each other or to the transfer arm platform, wherein, for each transfer arm part, drive shafts, interlocked with transfer driving motors or speed reducers installed on one of the transfer link arms, and output shafts interlocked with the drive shafts are installed on the transfer link arms.
    Type: Grant
    Filed: January 24, 2023
    Date of Patent: April 15, 2025
    Assignee: T-Robotics Co., Ltd.
    Inventors: Soo Jong Lee, Chang Seong Lee, Seung Young Baek, Moon Gi Hur
  • Patent number: 12255090
    Abstract: A substrate transfer apparatus that transfers a substrate in a vacuum chamber is provided. The substrate transfer apparatus includes: an elevating robot, a travel robot, and a substrate transfer robot. The travel robot includes: (i) a travel arm, through which a b1-st vertical through-hole and a b2-nd vertical through-hole are formed, wherein an internal slot is formed at inner area of the travel arm than where the b2-nd vertical through-hole is located, wherein the internal slot is separated from the b2-nd vertical through-hole with a partition, wherein a bottom-open-type space that connects the b2-nd vertical through-hole with the internal slot is formed in the travel arm, and wherein an internal wiring hole that connects the b1-st vertical through-hole with the internal slot is formed in the travel arm, (ii) a b-th driving motor installed in the internal slot, and (iii) a b-th speed reducer installed in the b2-nd vertical through-hole.
    Type: Grant
    Filed: October 24, 2024
    Date of Patent: March 18, 2025
    Assignee: T-Robotics Co., Ltd.
    Inventors: Soo Jong Lee, Chang Seong Lee, Chang Hyun Jee, Sang Hwi Ham
  • Patent number: 12234106
    Abstract: A substrate transfer apparatus transfers a substrate in a vacuum chamber. The substrate transfer apparatus includes an elevating robot, a travel robot and a transfer robot. The elevating robot includes an elevating plate through which through-holes are formed, and hollow elevating shafts, wherein each central axis of the hollow elevating shafts corresponds to each center of the through-holes, wherein the elevating robot is sealably coupled with a vacuum chamber through-hole. The travel robot includes a travel arm platform through which coupling holes are formed, wherein each of the hollow elevating shafts is inserted into each lower space of each of the coupling holes, a first travel arm part including a (1_1)-st and a (1_2)-nd travel link arms, second travel arm parts including a (2_1)-st and a (2_2)-nd travel link arms, and a transfer robot coupling part coupled with the (1_2)-nd and the (2_2)-nd travel link arms.
    Type: Grant
    Filed: August 8, 2024
    Date of Patent: February 25, 2025
    Assignee: T-ROBOTICS CO., LTD.
    Inventors: Soo Jong Lee, Chang Seong Lee, Chang Hyun Jee, Sang Hwi Ham
  • Patent number: 12131939
    Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein link connecting members with blades are engaged at front and rear areas of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms, multiple subordinate link arms and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.
    Type: Grant
    Filed: January 24, 2023
    Date of Patent: October 29, 2024
    Assignee: T-Robotics Co., Ltd.
    Inventors: Soo Jong Lee, Chang Seong Lee, Seung Young Baek, Moon Gi Hur
  • Patent number: 12080586
    Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, each compartmentalized into a lower and an upper space, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, for each transfer arm part, drive shafts, interlocked with transfer driving motors or speed reducers installed on one of the transfer link arms, and output shafts interlocked with the drive shafts are installed on the transfer link arms.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: September 3, 2024
    Assignee: T-Robotics Co., Ltd.
    Inventors: Soo Jong Lee, Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham, Moon Gi Hur, Jae Hyun Park, Tae Han Lee
  • Patent number: 11850744
    Abstract: A travel robot for moving a substrate transfer robot in a transfer chamber includes: an elevating part for driving an elevating drive shaft installed in the transfer chamber, a first travel link arm engaged with the elevating drive shaft, a second and a third travel link arm respectively having a first and a second driving motors installed therein, wherein two travel drive shafts are interlocked with the first driving motor and their corresponding travel output shafts, wherein the travel drive shafts and the travel output shafts are installed on the first travel link arm, wherein a rotation drive shaft interlocked with the second driving motor and a rotation output shaft interlocked with the rotation drive shaft and the substrate transfer robot are installed on the third travel link arm, and wherein the travel output shafts are engaged with the first and the third travel link arm.
    Type: Grant
    Filed: August 30, 2022
    Date of Patent: December 26, 2023
    Assignee: T-Robotics Co., Ltd.
    Inventors: Soo Jong Lee, Eun Jae Choi, Hyeon Ju Kim, Jun Young Kim
  • Patent number: 11820005
    Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: November 21, 2023
    Assignee: T-Robotics Co., Ltd.
    Inventors: Soo Jong Lee, Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee, Sang Hwi Ham, Moon Gi Hur, Jae Hyun Park, Tae Han Lee