Patents Assigned to T0LLES
  • SUBSTRATE POLISHING ARTICLE
    Publication number: 20020077034
    Abstract: A polishing material for chemical mechanical polishing has a mesh of fibers and a binder material holding the fibers in the mesh. The binder material coalesced among the fibers to leave pores in the interstices between the fibers of the mesh. The fibers and binder material provide the polishing material with a brittle texture. The fibers can be cellulose, and the binder material can be a phenolic resin.
    Type: Application
    Filed: January 18, 2000
    Publication date: June 20, 2002
    Applicant: T0LLES
    Inventor: Robert D Tolles