Abstract: A semiconductor transducer (10) including a substrate having a well (18) formed in one surface thereof and a semiconductor layer (14) having a first surface (26) bonded to the substrate about the periphery of the well to form a diaphragm (30) and a second surface (28) which is substantially parallel to the first surface and has a pedestal (16) projecting therefrom which is disposed above the well. The side walls (32) of the pedestal are substantially orthogonal to the second surface of the semiconductor layer and are formed by sawing edge portions of said semiconductor layer. The substrate includes structures (38) which extend upward from the bottom of the well to limit the deflection of the diaphragm.
Type:
Grant
Filed:
July 14, 1987
Date of Patent:
August 29, 1989
Assignee:
Tactile Perceptions, Inc.
Inventors:
James W. Knutti, Henry V. Allen, Kurt E. Petersen, Carl R. Kowalski
Abstract: A semiconductor transducer (10) including a substrate having a well (18) formed in one surface thereof and a semiconductor layer (14) having a first surface (26) bonded to the substrate about the periphery of the well to form a diaphragm (30) and a second surface (28) which is substantially coplanar to the first surface and has a pedestal (16) projecting therefrom which is disposed above the well. The side walls (32) of the pedestal are substantially orthogonal to the second surface of the semiconductor layer. Means (34) are provided for sensing the deflection of the diaphragm as a function of force applied to the pedestal. The substrate includes protrusions (38) which extend upward from the bottom of the well to limit the deflection of the diaphragm.
Type:
Grant
Filed:
June 4, 1984
Date of Patent:
July 14, 1987
Assignee:
Tactile Perceptions, Inc.
Inventors:
James W. Knutti, Henry V. Allen, Kurt E. Petersen, Carl R. Kowalski