Patents Assigned to Taesan LCD. Co., Ltd.
  • Patent number: 6843122
    Abstract: The present invention relates to a mass flow controller for a control purge and a managing method of the same. When a user sets the mode to a control purge mode capable of controlling a maximum flowing amount for constantly maintaining a maximum flowing amount when performing a purge function after the user sets a purge function mode based on a purpose of use of a mass flow controller, a control circuit compares a set value of a flowing amount inputted based on a user's selection with a previously set threshold value and controls a valve for constantly maintaining a maximum flowing amount by switching to a gain resistor for a purge mode having a gain value capable of performing a purge function and controls a valve for thereby accurately controlling a small flowing amount by switching to a gain resistor for a common control mode having a gain value capable of performing a common control function.
    Type: Grant
    Filed: May 7, 2003
    Date of Patent: January 18, 2005
    Assignee: Taesan LCD. Co., Ltd.
    Inventors: Hae-Lyong Kim, Tae-Ho Lee
  • Publication number: 20040123657
    Abstract: The present invention relates to a mass flow controller for a control purge and a managing method of the same. When a user sets the mode to a control purge mode capable of controlling a maximum flowing amount for constantly maintaining a maximum flowing amount when performing a purge function after the user sets a purge function mode based on a purpose of use of a mass flow controller, a control circuit compares a set value of a flowing amount inputted based on a user's selection with a previously set threshold value and controls a valve for constantly maintaining a maximum flowing amount by switching to a gain resistor for a purge mode having a gain value capable of performing a purge function and controls a valve for thereby accurately controlling a small flowing amount by switching to a gain resistor for a common control mode having a gain value capable of performing a common control function.
    Type: Application
    Filed: May 7, 2003
    Publication date: July 1, 2004
    Applicant: TAESAN LCD CO., LTD.
    Inventors: Hae-Lyong Kim, Tae-Ho Lee