Patents Assigned to Taipei Semiconductor Manufacturing Company, Ltd.
  • Substrate Assembly Carrier Using Electrostatic Force
    Publication number: 20120227886
    Abstract: A portable electrostatic chuck carrier includes a holder having a dielectric top surface, and bipolar electrodes under the dielectric top surface. The bipolar electrodes includes positive electrodes and negative electrodes electrically insulated from the positive electrodes. The positive electrodes and the negative electrodes are allocated in an alternating pattern in a plane substantially parallel to the dielectric top surface.
    Type: Application
    Filed: March 10, 2011
    Publication date: September 13, 2012
    Applicant: Taipei Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Li Hsiao, Chen-Hua Yu, Chung-Shi Liu, Chien Ling Hwang, Ying-Jui Huang