Patents Assigned to Taiwan Mask Corporation
  • Method for testing mask articles
    Patent number: 8692560
    Abstract: A method for testing a mask article includes the steps of electrically connecting the mask article to an electrical sensor, applying a bias voltage to a plurality of testing sites of the mask article with a conductor, measuring at least one current distribution of the testing sites with the electrical sensor, and determining the quality of the mask article by taking the at least one current distribution into consideration.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: April 8, 2014
    Assignee: Taiwan Mask Corporation
    Inventor: Ming-Chih Chen
  • Method for testing mask articles
    Patent number: 8604806
    Abstract: A method for testing a mask article includes steps of electrically connecting the mask article to an electrical sensor, applying a bias voltage to a plurality of testing sites of the mask article with a conductor, measuring at least one current distribution of the testing sites with the electrical sensor, and determining the quality of the mask article by taking the at least one current distribution into consideration.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: December 10, 2013
    Assignee: Taiwan Mask Corporation
    Inventor: Ming-Chih Chen
  • Method for testing mask articles
    Patent number: 8502544
    Abstract: A method for testing a mask article includes the steps of electrically connecting the mask article to an electrical sensor, applying a bias voltage to a plurality of testing sites of the mask article with a conductor, measuring at least one current distribution of the testing sites with the electrical sensor, and determining the quality of the mask article by taking the at least one current distribution into consideration.
    Type: Grant
    Filed: July 14, 2012
    Date of Patent: August 6, 2013
    Assignee: Taiwan Mask Corporation
    Inventors: Ming-Chih Chen, Hsiang-Jen Yang, Chen-Rui Tseng