Patents Assigned to Taiwan Semiconductor Manufacturing Company
  • Publication number: 20250120323
    Abstract: A semiconductor device includes a plurality of interlayer dielectric layers, a memory cell, and a first capping layer. The memory cell is embedded in the interlayer dielectric layers, the first capping layer covers the memory cell and surrounds the sidewalls of the memory cell, the first capping layer includes a hydrogen absorbing material, and the hydrogen absorbing material prevents hydrogen gas from entering the memory cell.
    Type: Application
    Filed: October 5, 2023
    Publication date: April 10, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Nien-Yu Tai, Kuo-Feng Huang, Yi-Jen HUANG, Yu-Jen WANG, HARRY-HAKLAY CHUANG
  • Publication number: 20250120167
    Abstract: A semiconductor device includes a plurality of semiconductor layers vertically separated from one another, a gate structure that comprises a lower portion and an upper portion, a gate spacer that extends along a sidewall of the upper portion of the gate structure and has a bottom surface, and an etch stop layer extends between the portion of the bottom surface of the gate spacer and the top surface of the topmost semiconductor layer.
    Type: Application
    Filed: December 16, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuei-Yu Kao, Chao-Cheng Chen, Chih-Han Lin, Chen-Ping Chen, Ming-Ching Chang, Shih-Yao Lin, Chih-Chung Chiu
  • Publication number: 20250120138
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. The first semiconductor layers, the second semiconductor layer and an upper portion of the fin structure at a source/drain region of the fin structure, which is not covered by the sacrificial gate structure, are etched. A dielectric layer is formed over the etched upper portion of the fin structure. A source/drain epitaxial layer is formed. The source/drain epitaxial layer is connected to ends of the second semiconductor wires, and a bottom of the source/drain epitaxial layer is separated from the fin structure by the dielectric layer.
    Type: Application
    Filed: December 16, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lin YANG, Chao-Ching CHENG, Tzu-Chiang CHEN, I-Sheng CHEN
  • Publication number: 20250120158
    Abstract: Bipolar junction transistor (BJT) structures are provided. A BJT structure includes a semiconductor substrate, a collector region formed in the semiconductor substrate, a plurality of base regions formed over the collector region, a plurality of emitter regions formed over the collector region, a ring-shaped shallow trench isolation (STI) region formed in the collector region, a plurality of base conductive layers formed over the collector region and on opposite sides of the base regions, a plurality of sidewall dielectric layers formed on top surfaces of the base conductive layers and disposed vertically between the base conductive layers and upper portions of the emitter regions, and a plurality of base contacts formed on the base conductive layers. The base contacts are divided into a first group of base contacts disposed between the base regions and a second group of base contacts disposed between the base regions and the STI region.
    Type: Application
    Filed: December 16, 2024
    Publication date: April 10, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuan-Jung CHEN, Chun-Ming LIN, Tsung-Lin LEE, Shiuan-Jeng LIN, Hung-Lin CHEN
  • Publication number: 20250120176
    Abstract: A semiconductor device includes a plurality of standard cells. The plurality of standard cells include a first group of standard cells arranged in a first row extending in a row direction and a second group of standard cells arranged in a second row extending in the row direction. The first group of standard cells and the second group of standard cells are arranged in a column direction. A cell height of the first group of standard cells in the column direction is different from a cell height of the second group of standard cells in the column direction.
    Type: Application
    Filed: December 19, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ta-Pen GUO, Lee-Chung LU, Li-Chun TIEN
  • Publication number: 20250119060
    Abstract: A circuit is disclosed. The circuit includes a first pump circuit configured to receive a first reference voltage and provide an output voltage at a first level based on the first reference voltage. The circuit includes a second pump circuit configured to receive a second reference voltage and provide the output voltage at a second level based on the second reference voltage. The first reference voltage is lower than the second reference voltage, and the first level is lower than the second level.
    Type: Application
    Filed: October 10, 2023
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng Han Lu, Chia-Fu Lee, Yen-An Chang
  • Publication number: 20250120171
    Abstract: A fin-type field effect transistor comprising a substrate, at least one gate stack and epitaxy material portions is described. The substrate has fins and insulators located between the fins, and the fins include channel portions and flank portions beside the channel portions. The at least one gate stack is disposed over the insulators and over the channel portions of the fins. The epitaxy material portions are disposed over the flank portions of the fins and at two opposite sides of the at least one gate stack. The epitaxy material portions disposed on the flank portions of the fins are separate from one another.
    Type: Application
    Filed: December 17, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun Hsiung Tsai, Ziwei Fang, Tsan-Chun Wang, Kei-Wei Chen
  • Publication number: 20250120151
    Abstract: A method of fabricating a semiconductor structure includes forming a recess in an active channel structure by removing a portion thereof, filling the recess with a dielectric material, forming a cladding layer adjacent the active channel structure but not adjacent the dielectric material, and forming a gate structure comprising a first gate structure and a second gate structure around the active channel structure. A width of the dielectric material in the recess is greater than a width of the first gate structure and a width of the second gate structure.
    Type: Application
    Filed: December 16, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: KUEI-YU KAO, Shih-Yao LIN, Chen-Ping Chen, Chih-Han Lin, MING-CHING CHANG, CHAO-CHENG CHEN
  • Publication number: 20250120139
    Abstract: A semiconductor device structure includes nanostructures formed over a substrate. The structure also includes a fin isolation structure formed beside the nanostructures. The structure also includes a work function layer surrounding the nanostructures and covering a sidewall of the fin isolation structure. The structure also includes a gate electrode layer covering the work function layer. The gate electrode layer has an extending portion surrounded by the work function layer.
    Type: Application
    Filed: December 17, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Fai CHENG, Liang-Yi CHEN, Chi-An WANG, Kuan-Chung CHEN, Chih-Wei LEE
  • Publication number: 20250120058
    Abstract: A memory cell is disclosed. The memory cell includes a first transistor. The first transistor includes a first conduction channel collectively constituted by one or more first nanostructures spaced apart from one another along a vertical direction. The memory cell includes a second transistor electrically coupled to the first transistor in series. The second transistor includes a second conduction channel collectively constituted by one or more second nanostructures spaced apart from one another along the vertical direction. At least one of the one or more first nanostructures is applied with first stress by a first metal structure extending, along the vertical direction, into a first drain/source region of the first transistor.
    Type: Application
    Filed: December 16, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Sheng Chang, Chia-En Huang, Yi-Hsun Chiu, Yih Wang
  • Publication number: 20250116698
    Abstract: A semiconductor testing apparatus is provided, and includes a base, a conductive socket, a pusher, and a thermal interface material structure. The conductive socket is disposed in the base for containing a semiconductor structure. The pusher is over the conductive socket and movable in a vertical direction. The thermal interface material structure is connected to the pusher, and includes a resilient material and a metal film around the resilient material. The metal film and the resilient material are in contact with the pusher.
    Type: Application
    Filed: January 16, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Hsuan CHANG, Yuan-Li LIN, Sheng-Ming YANG, Kuo-Ming LU
  • Publication number: 20250117035
    Abstract: A reference voltage generator includes an input terminal configured to receive an enable signal and an output terminal configured to provide an output signal. A voltage generator circuit is arranged to generate a first output voltage signal, and a pre-settling circuit is arranged to generate a second output voltage. The pre-settling circuit is configured to provide the second output voltage signal at the output terminal in response to the enable signal received at the input terminal, and following a first time period provide the first output voltage at the output terminal.
    Type: Application
    Filed: November 6, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-An Chang, Yi-Chun Shih, Chieh-Pu Lo
  • Publication number: 20250116937
    Abstract: A lithography method includes the steps which are mentioned below. A photoresist layer is formed over a substrate. The photoresist layer is exposed. The photoresist layer is developed. A vacuum treatment is performed to the photoresist layer. The substrate is etched by using the photoresist layer as an etch mask.
    Type: Application
    Filed: October 4, 2023
    Publication date: April 10, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Hui WENG, Wei-Han LAI, Hsien-Chung HUANG, Ching-Yu CHANG
  • Publication number: 20250118345
    Abstract: Memory systems and operating method of a memory system are provided. The memory system utilized for performing a computing-in-memory (CiM) operation comprises a memory array and a processing circuit. The memory array comprises a plurality of memory cells. The processing circuit is coupled to the memory array and comprises a programming circuit and a control circuit. The programming circuit is coupled to the memory array and configured to perform a write operation for programming electrical characteristics of the memory cells. The control circuit is coupled to the programming circuit and configured to: receive a plurality of weight data corresponding to a plurality of weight values; and control the write operation performed by the programming circuit, so the electrical characteristics of the memory cells are programmed following a sequential order of the weight values.
    Type: Application
    Filed: December 16, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Win-San KHWA, Ping-Chun WU, Tung Ying LEE, Meng-Fan CHANG
  • Publication number: 20250117187
    Abstract: A computing circuit is configured to perform a bit-serial multiplication of an input signal and a weight signal. A multiplier circuit is configured to receive the input signal and the weight signal and to provide a product sum. An adder circuit is configured to receive the product sum and to provide a partial sum. A partial sum register is configured to: clock-gate a second part of the partial sum register; receive the partial sum; provide, based on the partial sum, a first output of the bit-serial multiplication through a first part of the partial sum register; determine whether not to clock-gate the second part of the partial sum register or not based on a first feature bit of the partial sum; and provide, based on the first feature bit of the partial sum, a second output of the bit-serial multiplication through the second part of the partial sum register.
    Type: Application
    Filed: October 4, 2023
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Win-San Khwa, Yi-Lun Lu, Jen-Chieh Liu, Jui-Jen Wu, Meng-Fan Chang
  • Publication number: 20250118658
    Abstract: A semiconductor device includes a semiconductor substrate, an interconnection layer and an inductor pattern. The interconnection layer is disposed on the semiconductor substrate. The inductor pattern is electrically connected to the interconnection layer. The inductor pattern includes a first conductive line joined with a first terminal, a second conductive line joined with a second terminal, and a plurality of conductive coils. The conductive coils are joining the first conductive line to the second conductive line, and includes an outer coil joined with the first conductive line, an inner coil joined with the second conductive line and the outer coil. The second conductive line is spaced apart from a first side of the inner coil in a first direction by distance Y, the second terminal is spaced apart from a second side of the inner coil in a second direction by distance X1, wherein X1>1.25Y.
    Type: Application
    Filed: December 17, 2024
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hsien Lai, Shih-Ming Chen, Han-Chang Hsieh
  • Publication number: 20250116931
    Abstract: A photoresist composition includes a solvent and a polymer. The polymer comprises a polymer backbone, an acid labile group monomer, a photo acid generator monomer and a quencher monomer. The acid labile group monomer is bonded to the polymer backbone. The acid labile group monomer is acid cleavable. The photo acid generator monomer is bonded to the polymer backbone. The quencher monomer is bonded to the polymer backbone.
    Type: Application
    Filed: October 10, 2023
    Publication date: April 10, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Hui Weng, Wei-Han Lai, Ching-Yu Chang
  • Publication number: 20250118346
    Abstract: A device includes a first memory subarray, a first modulation circuit, a second memory subarray, a second modulation circuit and a control signal generator. The first modulation circuit is coupled to the first memory subarray. The second memory subarray is located between the first memory subarray and the first modulation circuit along a direction. The second modulation circuit is coupled to the second memory subarray. The control signal generator is configured to generate a first control signal to trigger the first modulation circuit according to a first length of the first memory subarray along the direction, and configured to generate a second control signal to trigger the second modulation circuit according to a second length of the second memory subarray along the direction.
    Type: Application
    Filed: December 17, 2024
    Publication date: April 10, 2025
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY LIMITED, TSMC CHINA COMPANY LIMITED
    Inventors: Xiu-Li YANG, He-Zhou WAN, Mu-Yang YE, Lu-Ping KONG, Ming-Hung CHANG
  • Publication number: 20250118665
    Abstract: Provided are a semiconductor device and a method of forming the same. The semiconductor device includes a device layer having a frontside and a backside; a first interconnect structure disposed on the frontside of the device layer, and having a first seal ring structure; a second interconnect structure disposed on the backside of the device layer; and a diode and a transistor embedded in the device layer, wherein a gate of the transistor is electrically connected to the first seal ring structure by the diode.
    Type: Application
    Filed: October 5, 2023
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Yung-Shih CHENG
  • Publication number: 20250118383
    Abstract: A semiconductor device includes a memory cell including a first transistor, a second transistor, and a resistor. Each of the first transistor and the second transistor is operatively coupled to the resistor in series. The second transistor is formed below the resistor such that the second transistor provides heat to the resistor when the memory cell is being programmed.
    Type: Application
    Filed: October 10, 2023
    Publication date: April 10, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Meng-Sheng Chang