Patents Assigned to Taiwan Semiconductor Manufacturing Company, Limited
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Publication number: 20240249792Abstract: A method of extending a lifetime of a memory cell is provided. The method includes detecting, by a memory controller, whether a memory cell has failed or not; repairing, by the memory controller, the memory cell by applying a first pulse having a first amplitude to the memory cell, in response to determining that the memory cell has failed; and writing, by the memory controller, input data to the memory cell by applying a second pulse having a second amplitude less than the first amplitude, in response to repairing the memory cell. In one expect, the detecting includes writing, by the memory controller, additional input data to the memory cell; reading, by the memory controller, data stored by the memory cell; comparing, by the memory controller, the data stored by the memory cell with the additional input data; and determining whether the memory cell has failed according to the comparison.Type: ApplicationFiled: April 3, 2024Publication date: July 25, 2024Applicant: Taiwan Semiconductor Manufacturing Company LimitedInventors: Yung-Huei Lee, Pei-Chun Liao, Jian-Hong Lin, Dawei Heh, Wen Hsien Kuo
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Patent number: 12046615Abstract: A semiconductor device is provided. The semiconductor device includes a first deep trench isolation (DTI) structure within a substrate. The first DTI structure includes a barrier structure, a dielectric structure, and a copper structure. The dielectric structure is between the barrier structure and the copper structure. The barrier structure is between the substrate and the dielectric structure.Type: GrantFiled: March 4, 2021Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Yung-Hsiang Chen, Yu-Lung Yeh, Yen-Hsiu Chen, Bo-Chang Su, Cheng-Hsien Chen
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Patent number: 12046550Abstract: Metal-insulator-metal (MIM) capacitor, an integrated semiconductor device having a MIM capacitor and methods of making. The MIM capacitor includes a first metal layer, a second metal layer and a dielectric layer located between the second metal layer and the first metal layer. The first metal layer, the second metal layer and the dielectric layer may be formed in a comb structure, wherein the comb structure include a first tine structure and at least a second tine structure.Type: GrantFiled: February 13, 2023Date of Patent: July 23, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Paul Yang, Tsun-Kai Tsao, Sheng-Chau Chen, Sheng-Chan Li, Cheng-Yuan Tsai
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Patent number: 12048137Abstract: A semiconductor arrangement includes a memory array including bitcells and a peripheral logic block for accessing the bitcells. The peripheral logic block includes a first nanostructure having a first width for providing power to a first logic unit of the peripheral logic block, and a second nanostructure axially aligned with the first nanostructure and having a second width less than the first width for providing power to a second logic unit of the peripheral logic block.Type: GrantFiled: August 17, 2021Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Po-Sheng Wang, Ru-Yu Wang, Yangsyu Lin, You-Cheng Xiao
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Patent number: 12046663Abstract: A method includes forming a first fin and a second fin over a substrate. The method includes forming a first dummy gate structure that straddles the first fin and the second fin. The first dummy gate structure includes a first dummy gate dielectric and a first dummy gate disposed over the first dummy gate dielectric. The method includes replacing a portion of the first dummy gate with a gate isolation structure. The portion of the first dummy gate is disposed over the second fin. The method includes removing the first dummy gate. The method includes removing a first portion of the first dummy gate dielectric around the first fin, while leaving a second portion of the first dummy gate dielectric around the second fin intact. The method includes forming a gate feature straddling the first fin and the second fin, wherein the gate isolation structure intersects the gate feature.Type: GrantFiled: March 23, 2023Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Shih-Yao Lin, Chih-Han Lin, Shu-Uei Jang, Ya-Yi Tsai, Chi-Hsiang Chang, Tzu-Chung Wang, Shu-Yuan Ku
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Patent number: 12040163Abstract: A connect structure for semiconductor processing equipment includes a housing configured to mate a deformable pipe with a non-deformable pipe. The housing includes a first annular sidewall to receive the deformable pipe and a second annular sidewall defining a first thread structure. An annular bead is connected to the first annular sidewall to flexibly deform the deformable pipe toward the non-deformable pipe structure when the first thread structure rotatably engages a second thread structure of the non-deformable pipe.Type: GrantFiled: July 18, 2022Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Ming-Sze Chen, Hung-Chih Wang, Yuan-Hsin Chi, Sheng-Yuan Lin
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Patent number: 12040242Abstract: A three-dimensional device structure includes a first die, a second die disposed on the first die, and a connection circuit. The first die includes a first semiconductor substrate, a first interconnect structure disposed on the first semiconductor substrate, and a first seal ring surrounding the interconnect structure. The second die includes a second semiconductor substrate, a second interconnect structure disposed on the second semiconductor substrate, and a second seal ring surrounding the interconnect structure. The first connection circuit electrically couples the first seal ring to the second seal ring to provide an electrostatic discharge path.Type: GrantFiled: August 26, 2021Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Jen-Yuan Chang, Chien-Chang Lee, Chia-Ping Lai
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Patent number: 12040353Abstract: A first-tier capacitor assembly is formed, which includes a first alternating layer stack embedded within a first substrate and including at least two first metallic electrode layers interlaced with at least one first node dielectric layer, and first metallic bonding pads located on a first front surface. A second-tier capacitor assembly is formed, which includes a second alternating layer stack embedded within a second substrate and including at least two second metallic electrode layers interlaced with at least one second node dielectric layers, and second metallic bonding pads located on a second backside surface. The second metallic bonding pads are bonded to the first metallic bonding pads such that each of the at least two first metallic electrode layers contacts a respective one of the at least two second metallic electrode layers. A capacitor with increased capacitance is provided.Type: GrantFiled: August 27, 2021Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Tao-Cheng Liu, Ying-Hsun Chen
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Patent number: 12040289Abstract: An organic interposer includes interconnect-level dielectric material layers embedding redistribution interconnect structures, package-side bump structures located on a first side of the interconnect-level dielectric material layers, at least one dielectric capping layer located on a second side of the interconnect-level dielectric material layers, a bonding-level dielectric layer located on the at least one dielectric capping layer, metallic pad structures including pad via portions embedded in the at least one dielectric capping layer and pad plate portions embedded in the bonding-level dielectric layer, and an edge seal ring structure vertically extending from a first horizontal plane including bonding surfaces of the package-side bump structures to a second horizontal plane including distal planar surfaces of the metallic pad structures.Type: GrantFiled: August 26, 2021Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Hong-Seng Shue, Ming-Da Cheng, Ching-Wen Hsiao, Yao-Chun Chuang, Yu-Tse Su, Chen-Shien Chen
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Patent number: 12040019Abstract: Methods for programming memory cells of a resistive memory device include applying a voltage pulse sequence to a memory cell to set a logic state of the memory cell. An initial set sequence of voltage pulses may be applied to the memory cell, followed by a reform voltage pulse having an amplitude greater than the amplitudes of the initial set sequence, and within ±5% of the amplitude of a voltage pulse used in an initial forming process. Additional voltage pulses having amplitudes that are less than the amplitude of the reform voltage pulse may be subsequently applied. By applying a reform voltage pulse in the middle of, or at the end of, a memory set sequence including multiple voltage pulses, a resistive memory device may have a larger memory window and improved data retention relative to resistive memory devices programmed using conventional programming methods.Type: GrantFiled: May 5, 2023Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Fu-Chen Chang, Chu-Jie Huang, Nai-Chao Su, Kuo-Chi Tu, Wen-Ting Chu
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Patent number: 12040267Abstract: An organic interposer includes dielectric material layers embedding redistribution interconnect structures, package-side bump structures located on a first side of the dielectric material layers, and die-side bump structures located on a second side of the dielectric material layers. A gap region is present between a first area including first die-side bump structures and a second area including second die-side bump structures. Stress-relief line structures are located on, or within, the dielectric material layers within an area of the gap region in the plan view. Each stress-relief line structures may include straight line segments that laterally extend along a respective horizontal direction and is not electrically connected to the redistribution interconnect structures. The stress-relief line structures may include the same material as, or may include a different material from, a metallic material of the redistribution interconnect structures or bump structures that are located at a same level.Type: GrantFiled: March 14, 2023Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Li-Ling Liao, Ming-Chih Yew, Chia-Kuei Hsu, Shu-Shen Yeh, Po-Yao Lin, Shin-Puu Jeng
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Patent number: 12040409Abstract: A semiconductor device includes an insulating layer embedding a gate electrode and overlying a substrate, a stack of a gate dielectric including a gate dielectric material, a dielectric diffusion barrier liner including a dielectric diffusion barrier material, and an active layer overlying a top surface of the gate electrode, and a source electrode and a drain electrode contacting a respective portion of a top surface of the active layer. The dielectric diffusion barrier material is different from the gate dielectric material and is selected from a dielectric metal oxide material and a dielectric compound of silicon, and suppresses loss of metallic elements during subsequent anneal processes.Type: GrantFiled: September 7, 2021Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Wu-Wei Tsai, Hai-Ching Chen, Sai-Hooi Yeong, Yu-Ming Lin
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Patent number: 12034056Abstract: A semiconductor device includes a plurality of semiconductor layers vertically separated from one another. The semiconductor device includes a gate structure that comprises a lower portion and an upper portion. The lower portion wraps around each of the plurality of semiconductor layers. The semiconductor device includes a gate spacer that extends along a sidewall of the upper portion of the gate structure and comprises a first layer and a second layer. The first layer is in contact with a first portion of the sidewall and the second layer is in contact with a second portion of the sidewall.Type: GrantFiled: July 9, 2021Date of Patent: July 9, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Shih-Yao Lin, Kuei-Yu Kao, Chen-Ping Chen, Chih-Chung Chiu, Chih-Han Lin, Ming-Ching Chiang, Chao-Cheng Chen
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Patent number: 12027419Abstract: A semiconductor device includes an interconnect structure embedded in a first metallization layer comprising a dielectric material. The interconnect structure includes a first metal material. The semiconductor device includes a first liner structure embedded in the first metallization layer. The first liner structure is extended along one or more boundaries of the interconnect structure in the first metallization layer. The first liner structure includes a second metal material reacted with one or more dopants, the second metal material being different from the first metal material.Type: GrantFiled: June 25, 2020Date of Patent: July 2, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Ching-Fu Yeh, Yu-Chen Chan, Guanyu Luo, Meng-Pei Lu, Chao-Hsien Peng, Shin-Yi Yang, Ming-Han Lee, Andy Li
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Patent number: 12027847Abstract: An electrostatic discharge protection circuit includes an electrostatic discharge clamp between a first rail and a second rail, a trigger device configured to activate the electrostatic discharge clamp in response to an electrostatic discharge event, and a charge dissipation element between the first rail and the second rail to dissipate a residual charge at an input of the trigger device.Type: GrantFiled: April 24, 2023Date of Patent: July 2, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Ming-Fang Lai, Yi-Hsun Wu, Ching-Yun Chang
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Patent number: 12027431Abstract: A method of forming a semiconductor structure includes forming a first conductive contact in a first dielectric layer coupled to a first device and forming a second conductive contact in the first dielectric layer coupled to a second device. A first trench is formed in the first dielectric layer having a first depth and exposing at least a portion of the first conductive contact. A second trench is formed in the first dielectric layer having a second depth different than the first depth and exposing at least a portion of the second conductive contact. A first conductive layer is formed in the first trench and the second trench. A second dielectric layer is formed in the first trench and the second trench over the first conductive layer.Type: GrantFiled: June 16, 2021Date of Patent: July 2, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Jheng-Hong Jiang, Shing-Huang Wu, Chia-Wei Liu
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Patent number: 12027475Abstract: A die includes: a semiconductor substrate; an interconnect structure disposed on the semiconductor substrate and including: inter-metal dielectric (IMD) layers; metal features embedded in the IMD layers; and a guard ring structure including concentric first and second guard rings that extend through at least a subset of the IMD layers; and a through silicon via (TSV) structure extending through the semiconductor substrate and the subset of IMD layers to electrically contact one of the metal features. The first guard ring surrounds the TSV structure; and the second guard ring surrounds the first guard ring and is configured to reduce a parasitic capacitance between the guard ring structure and the TSV structure.Type: GrantFiled: June 21, 2023Date of Patent: July 2, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Jen-Yuan Chang, Chien-Chang Lee, Chia-Ping Lai
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Patent number: 12021084Abstract: A semiconductor device includes a substrate. The semiconductor device includes a dielectric fin that is formed over the substrate and extends along a first direction. The semiconductor device includes a gate isolation structure vertically disposed above the dielectric fin. The semiconductor device includes a gate structure extending along a second direction perpendicular to the first direction. The gate structure includes a first portion and a second portion separated by the gate isolation structure and the dielectric fin. The first portion of the gate structure presents a first beak profile and the second portion of the gate structure presents a second beak profile. The first and second beak profiles point toward each other.Type: GrantFiled: June 29, 2023Date of Patent: June 25, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Shih-Yao Lin, Chih-Han Lin, Ming-Ching Chang, Shu-Yuan Ku, Tzu-Chung Wang
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Patent number: 12021137Abstract: A method of forming a semiconductor device may include depositing a NiAl layer on a substrate, oxidizing the NiAl layer to form a bilayer including a NiO semiconducting material layer and an AlOx layer on the NiO semiconducting material layer, forming a semiconductor layer including the NiO semiconducting material layer, the semiconductor layer also including a channel region, and forming a gate dielectric on the channel region of the semiconductor layer.Type: GrantFiled: January 19, 2022Date of Patent: June 25, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventor: Oreste Madia
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Patent number: 12021155Abstract: A semiconductor device includes a channel region between a source region and a drain region, a gate over the channel region, a dielectric layer over the gate, a capacitive field plate over the dielectric layer, and a word line electrically coupled to the capacitive field plate.Type: GrantFiled: July 29, 2022Date of Patent: June 25, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Chin-Yi Huang, Wade Shih