Patents Assigned to Taiwan Semiconductor Maufacturing Company, Ltd.
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Patent number: 8969913Abstract: A high voltage laterally diffused metal-oxide-semiconductor (HV LDMOS) device, particularly an insulated gate bipolar junction transistor (IGBT), and a method of making it are provided in this disclosure. The device includes a semiconductor substrate having at least one highly doped buried portion, a first doped well grown over the substrate, a gate structure formed on the first well, a source and a drain formed on either side of the gate structure, and a second doped well having a U-shaped cross section formed in the first well. A portion of the drain is formed over the first well outside of the second well.Type: GrantFiled: November 9, 2012Date of Patent: March 3, 2015Assignee: Taiwan Semiconductor Maufacturing Company, Ltd.Inventors: Ker Hsiao Huo, Chih-Chang Cheng, Ru-Yi Su, Jen-Hao Yeh, Fu-Chih Yang, Chun Lin Tsai
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Publication number: 20140264478Abstract: A metal oxide semiconductor field effect transistor (MOSFET) includes a semiconductor substrate and a interlayer dielectric (ILD) over the semiconductor substrate. A gate structure is formed within the ILD and disposed on the semiconductor substrate, wherein the gate structure includes a high-k dielectric material layer and a metal gate stack. One or more portions of a protection layer are formed over the gate stack, and a contact etch stop layer is formed over the ILD and over the one or more portions of the protection layer. The metal gate stack includes aluminum and the protection layer includes aluminum oxide.Type: ApplicationFiled: March 12, 2013Publication date: September 18, 2014Applicant: Taiwan Semiconductor Maufacturing Company, LtdInventor: Taiwan Semiconductor Maufacturing Company, Ltd.
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Patent number: 8502620Abstract: A system and method for transmitting signals is disclosed. An embodiment comprises a balun, such as a Marchand balun, which has a first transformer with a primary coil and a first secondary coil and a second transformer with the primary coil and a second secondary coil. The first secondary coil and the second secondary coil are connected to a ground plane, and the ground plane has slot lines located beneath the separation of the coils in the first transformer and the second transformer. The slot lines may also have fingers.Type: GrantFiled: November 12, 2010Date of Patent: August 6, 2013Assignee: Taiwan Semiconductor Maufacturing Company, Ltd.Inventors: Jhe-Ching Lu, Hsiao-Tsung Yen, Sally Liu, Tzu-Jin Yeh, Min-Chie Jeng
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Patent number: 8487382Abstract: The present disclosure provides a method for making metal gate stacks of a semiconductor device. The method includes forming a high k dielectric material layer on a semiconductor substrate; forming a conductive material layer on the high k dielectric material layer; forming a dummy gate in a n-type field-effect transistor (nFET) region and a second dummy gate in a pFET region employing polysilicon; forming an inter-level dielectric (ILD) material on the semiconductor substrate; applying a first chemical mechanical polishing (CMP) process to the semiconductor substrate; removing the polysilicon from the first dummy gate, resulting in a first gate trench; forming a n-type metal to the first gate trench; applying a second CMP process to the semiconductor substrate; removing the polysilicon from the second dummy gate, resulting in a second gate trench; forming a p-type metal to the second gate trench; and applying a third CMP process to the semiconductor substrate.Type: GrantFiled: November 9, 2011Date of Patent: July 16, 2013Assignee: Taiwan Semiconductor Maufacturing Company, Ltd.Inventors: Sheng-Chen Chung, Kong-Beng Thei, Harry Chuang
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Patent number: 8434032Abstract: The present application discloses a method of generating an intellectual property (IP) block design kit including an IP block circuit design and a system-level characteristics table for manufacturing an integrated circuit. According at least one embodiment, the IP block circuit design is generated. The IP block circuit design is simulated based on predetermined configuration sets, and each configuration set has manufacturing options and/or operating conditions. A plurality of system-level models for the predetermined configuration sets are generated based on the simulation of the IP block circuit design. The system-level characteristics table is generated by arranging the predetermined configuration sets and the system-level models in compliance with a system-level characteristics table template of a system-level characteristics modeling device. Then the IP block circuit design and the system-level characteristics table are stored as the IP block design kit.Type: GrantFiled: November 19, 2010Date of Patent: April 30, 2013Assignee: Taiwan Semiconductor Maufacturing Company, Ltd.Inventors: Lee-Chung Lu, Yun-Han Lee, Wei-Li Chen, Tan-Li Chou, Kheng-Guan Tan, Shi-Hung Wang
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Publication number: 20120169409Abstract: A charge pump circuit includes at least one stage between an input end and an output end. The at least one stage includes a first CMOS transistor coupled with a first capacitor and a second CMOS transistor coupled with a second capacitor. The at least one stage is capable of receiving a first timing signal and a second timing signal for pumping an input voltage at the input end to an output voltage at the output end. During a transitional period of the first timing signal and the second timing signal, the at least one stage is capable of substantially turning off at least one of the first CMOS transistor and the second CMOS transistor for substantially reducing leakage currents flowing through at least one of the first CMOS transistor and the second CMOS transistor.Type: ApplicationFiled: March 9, 2012Publication date: July 5, 2012Applicant: TAIWAN SEMICONDUCTOR MAUFACTURING COMPANY, LTD.Inventors: Ming-Dou KER, Yi-Hsin WENG
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Publication number: 20110027944Abstract: A method of forming electrical connections to a semiconductor wafer. A semiconductor wafer comprising an insulation layer is provided. The insulation layer has a surface. A patterned mask layer is formed over the surface of the insulation layer. The patterned mask layer exposes portions of the surface of the insulation layer through a plurality of holes. The portions of the plurality of holes are filled with a metal material comprising copper to form elongated columns of the metal material. The elongated columns of the metal material have a sidewall surface. The patterned mask layer is removed to expose the sidewall surface of the elongated columns of the metal material. A protection layer is formed on the exposed sidewall surface of the elongated columns of the metal material.Type: ApplicationFiled: April 27, 2010Publication date: February 3, 2011Applicant: TAIWAN SEMICONDUCTOR MAUFACTURING COMPANY, LTD.Inventors: Chung-Shi LIU, Shin-Puu JENG, Mirng-Ji LII, Chen-Hua YU
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Patent number: 7871923Abstract: An integrated circuit structure comprising an air gap and methods for forming the same are provided. The integrated circuit structure includes a conductive line; a self-aligned dielectric layer on a sidewall of the conductive line; an air-gap horizontally adjoining the self-aligned dielectric layer; a low-k dielectric layer horizontally adjoining the air-gap; and a dielectric layer on the air-gap and the low-k dielectric layer.Type: GrantFiled: January 26, 2007Date of Patent: January 18, 2011Assignee: Taiwan Semiconductor Maufacturing Company, Ltd.Inventors: Chung-Shi Liu, Chen-Hua Yu
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Publication number: 20100102411Abstract: A backside-illuminated sensor including a semiconductor substrate. The semiconductor substrate has a front surface and a back surface. A plurality of pixels are formed on the front surface of the semiconductor substrate. At least one pixel includes a photogate structure. The photogate structure has a metal gate that includes a reflective layer.Type: ApplicationFiled: December 31, 2009Publication date: April 29, 2010Applicant: TAIWAN SEMICONDUCTOR MAUFACTURING COMPANY. LTD.Inventors: Tzu-Hsuan Hsu, Dun-Nian Yaung, Ching-Chun Wang
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Patent number: 6876894Abstract: A method and apparatus for simulating the functioning of various configurations of fabrication and test equipment within a manufacturing line creates a schedule for dispatching of the production lots to the manufacturing line. Based on the product mix forecast, the product volume forecast, the predicted sales schedule, the sales confidence, the actual sales order descriptions, and the product delivery schedule, a potential product dispatch schedule is established that enables a product to be fabricated within the manufacturing line. An equipment dispatch schedule for equipment employed in fabrication and testing of the product to be fabricated is defined according to the product dispatch schedule. The potential product dispatch schedule is then simulated based on the process and test equipment model. Upon completion of the simulation, the potential product dispatch schedule is assessed for optimization.Type: GrantFiled: November 5, 2003Date of Patent: April 5, 2005Assignee: Taiwan Semiconductor Maufacturing Company, Ltd.Inventors: Nai-Chiang Chen, Ta-Chin Lin, Joseph Chang, Chung-Shen Chen, Vincent Chiu