Patents Assigned to Taiwan Semiconductor
-
Publication number: 20100123135Abstract: An interconnect structure includes: a plurality of dielectric layers having aligned process control monitor (PCM) pads, and a conductive structure above a topmost one of the PCM pads. The conductive structure electrically connects the topmost PCM pad to a device under test above a level of the topmost PCM pad. The conductive structure is sized and shaped so as to leave a majority portion of the topmost PCM pad exposed for access by a test probe.Type: ApplicationFiled: January 26, 2010Publication date: May 20, 2010Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Hsien-Wei Chen
-
Patent number: 7719882Abstract: Disclosed herein is a technique for created an advanced MRAM array for constructing a memory integrated circuit chip. More specifically, the disclosed principles provide for an integrated circuit memory chip comprised of a combination of at least one of an array of high-speed magnetic memory cells, and at least one of an array of high-density magnetic memory cells. Accordingly, a memory chip constructed as disclosed herein provides the benefit of both high-speed and high-density memory cells on the same memory chip. As a result, applications benefiting from the use of (or perhaps even needing) high-speed memory cells are provided by the memory cells in the high-speed memory cell array.Type: GrantFiled: May 2, 2007Date of Patent: May 18, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wen-Chin Lin, Hsu-Chen Cheng, Yu-Jen Wang, Denny Tang
-
Patent number: 7718494Abstract: A method for forming a high-voltage drain metal-oxide-semiconductor (HVD-MOS) device includes providing a semiconductor substrate; forming a well region of a first conductivity type; and forming an embedded well region in the semiconductor substrate and only on a drain side of the HVD-MOS device, wherein the embedded region is of a second conductivity type opposite the first conductivity type. The step of forming the embedded well region includes simultaneously doping the embedded well region and a well region of a core regular MOS device, and simultaneously doping the embedded well region and a well region of an I/O regular MOS device, wherein the core and I/O regular MOS devices are of the first conductivity type. The method further includes forming a gate stack extending from over the embedded well region to over the well region.Type: GrantFiled: April 9, 2007Date of Patent: May 18, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yung Chih Tsai, Michael Yu, Chih-Ping Chao, Chih-Sheng Chang
-
Patent number: 7719064Abstract: A transistor suitable for high-voltage applications is provided. The transistor is formed on a substrate having a deep well of a first conductivity type. A first well of the first conductivity type and a second well of a second conductivity type are formed such that they are not immediately adjacent each other. The well of the first conductivity type and the second conductivity type may be formed simultaneously as respective wells for low-voltage devices. In this manner, the high-voltage devices may be formed on the same wafer as low-voltage devices with fewer process steps, thereby reducing costs and process time. A doped isolation well may be formed adjacent the first well on an opposing side from the second well to provide further device isolation.Type: GrantFiled: April 10, 2008Date of Patent: May 18, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Bau Wu, Chien-Shao Tang, Robin Hsieh, Ruey-Hsin Liu, Shun-Liang Hsu
-
Patent number: 7720564Abstract: A transport system. The transport system comprises a first interbay component, a second interbay component, a plurality of intrabay components, and a route controller. The first and second interbay components transport the vehicles between the tool bays. Each of the intrabay components, linked with the second interbay component, transports the vehicles within one of the tool bays. Additionally, the intrabay component does not link with the first interbay component directly. The route controller estimates a transport cost for transporting the vehicle via the second interbay device, and determines whether the vehicle is to be transported via the first or second interbay component according to the estimated transport cost.Type: GrantFiled: February 21, 2006Date of Patent: May 18, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Kuo-Hua Wang, Hsing-Fu Wang
-
Patent number: 7719122Abstract: A system-in-package (SiP) package is provided. In one embodiment, the SiP package comprises a substrate having a first surface and a second surface opposite the first surface, the substrate having a set of bond wire studs on bond pads formed on the second surface thereof; a first semiconductor chip having a first surface and a second surface opposite the first surface, wherein the first surface of the first semiconductor chip is mounted to the second surface of the substrate by means of solder bumps; an underfill material disposed between the first semiconductor chip and the substrate, encapsulating the solder bumps; a second semiconductor chip having a first surface and a second surface opposite the first surface, wherein the first surface of the second semiconductor chip is mounted to the second surface of the first semiconductor chip; and a set of bond wires electrically coupled from the second semiconductor chip to the set of bond wire studs on the substrate.Type: GrantFiled: January 11, 2007Date of Patent: May 18, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Pei-Haw Tsao, Bill Kiang, Liang-Chen Lin, Pao-Kang Niu, I-Tai Liu
-
Patent number: 7719909Abstract: This invention discloses a write-sensing circuit for a semiconductor memory having at least one memory block with a continuous word-line being coupled to all the memory cells in a column of the memory block and a continuous bit-line being coupled to all the memory cells in a row of the memory block, the write-sensing circuit comprising a first and a second sense amplifier belonging to the same memory block, a first switching device coupled between the first sense amplifier and a first power supply, the first switching device being controlled by a first signal, and a second switching device coupled between the second sense amplifier and the first power supply, the second switching device being controlled by a second signal different from the first signal, wherein when the first sense amplifier is activated, the second sense amplifier can remain de-activated.Type: GrantFiled: April 9, 2008Date of Patent: May 18, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shine Chung, Cheng-Hsien Hung
-
Publication number: 20100119958Abstract: A mask for manufacturing a semiconductor device comprises a transparent substrate. A metal-containing layer overlies the transparent substrate in a first region. A capping layer overlies and is coextensive with the metal-containing layer without wrapping around side edges of the metal-containing layer. The capping layer is substantially free of nitride. The transparent substrate has a second region separate from the first region. The transparent substrate is exposed in the second region.Type: ApplicationFiled: November 11, 2008Publication date: May 13, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chue San YOO, Chien-Chao HUANG, Cheng-Ming LIN, Chai-Wei CHANG, Jong-Yuh CHANG
-
Publication number: 20100118603Abstract: The present disclosure provides a non-volatile memory device. A memory device includes a first magnetic element having a fixed magnetization. The memory device also includes a second magnetic element having a non-fixed magnetization. The memory device further includes a barrier layer between the first and second magnetic elements. A unidirectional current source is electrically coupled to the first and second magnetic elements. The current source is configured to provide a first current to the first and second memory elements. The first current has a first current density and is in a first direction. The current source is also configured to provide a second current to the first and second magnetic elements. The second current has a second current density, different than the first current density, and is in the first direction.Type: ApplicationFiled: January 14, 2010Publication date: May 13, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yu-Jen Wang, Hsu-Chen Cheng, Denny Tang
-
Publication number: 20100117080Abstract: A semiconductor test pad interconnect structure with integrated die-separation protective barriers. The interconnect structure includes a plurality of stacked metal layers each having an electrically conductive test pad separated from other test pads by a dielectric material layer. In one embodiment, at least one metallic via bar is embedded into the interconnect structure and electrically interconnects each of the test pads in the metal layers together. The via bar extends substantially along an entire first side defined by each test pad in some embodiments. In other embodiments, a pair of opposing via bars may be provided that are arranged on opposite sides of a die singulation saw cut line defined in a scribe band on a semiconductor wafer.Type: ApplicationFiled: November 7, 2008Publication date: May 13, 2010Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsien-Wei Chen, Ying-Ju Chen, Yu-Wen Liu, Hao-Yi Tsai, Shin-Puu Jeng
-
Publication number: 20100117045Abstract: An array includes a transistor comprising a first terminal, a second terminal and a third terminal; a first contact plug connected to the first terminal of the transistor; a second contact plug connected to the first terminal of the transistor; a first resistive memory cell having a first end and a second end, wherein the first end is connected to the first contact plug; and a second resistive memory cell having a third end and a fourth end, wherein the third end is connected to the second contact plug.Type: ApplicationFiled: January 21, 2010Publication date: May 13, 2010Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzyh-Cheang Lee, Chun-Sheng Liang, Jiunn-Ren Hwang, Fu-Liang Yang
-
Publication number: 20100116709Abstract: An improved substrate transport pod for storing or transporting semiconductor wafer substrates during semiconductor wafer processing has a main body defined by a plurality of side panels. A substantial portion of at least one of the side panels being formed of a semi-permeable membrane allowing any corrosive gas molecules introduced to the interior of the pod to diffuse out of the transport pod through the semi-permeable membrane while preventing particulate contaminants from entering the transport pod.Type: ApplicationFiled: November 11, 2008Publication date: May 13, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Hsiao-Chyang LIU
-
Patent number: 7714414Abstract: In one embodiment, the disclosure relates to a method and apparatus for surface recovery of a polymer insulation layer through implantation. The method includes providing a substrate having thereon a conductive pad and an insulation layer, optionally processing the conductive pad to remove oxide layer formed on the conductive pad and conducting ion implantation to recover dielectric properties of the insulation layer.Type: GrantFiled: November 29, 2004Date of Patent: May 11, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsiu-Mei Yu, Ken-Shen Chou, Shun-Liang Hsu
-
Patent number: 7713854Abstract: A method of forming a gate dielectric layer includes forming a gate dielectric layer over a substrate. The gate dielectric layer is processed with carbon-containing ions. The gate dielectric layer is thermally processed, thereby providing the gate dielectric layer with a level of carbon between about 1 atomic % and about 20 atomic %.Type: GrantFiled: October 20, 2006Date of Patent: May 11, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chi-Chun Chen, Matt Yeh, Shih-Chang Chen, Mong-Song Liang, Jennifer Chen, Da-Yuan Lee
-
Patent number: 7714362Abstract: A semiconductor device including a plurality of input/output cells and having a first bond pad and at least one second bond pad coupled to each input/output cell. The first bond pads comprise a first pattern, and the at least second bond pads comprise at least one second pattern, wherein the at least one second pattern is different from or the same as the first pattern. Either the first bond pads, the at least second bond pads, or both, may be used to electrically couple the input/output cells of the semiconductor device to leads of an integrated circuit package or other circuit component.Type: GrantFiled: May 12, 2006Date of Patent: May 11, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Ker-Min Chen
-
Patent number: 7714392Abstract: A semiconductor device includes a semiconducting substrate having CMOS transistors thereon. A composite etch stop layer including a lowermost silicon oxynitride portion and an uppermost silicon nitride portion is disposed on the semiconducting substrate including the CMOS transistors. At least one dielectric layer is on the composite etch stop layer. A first contact opening extends to a first level through the composite etch stop layer thickness and a second contact opening extends to a second level deeper than the first level through the composite etch stop layer.Type: GrantFiled: May 7, 2007Date of Patent: May 11, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Der Chang, Yu-Ching Chang, Chien-Chih Chou, Yi-Tung Yen
-
Patent number: 7714376Abstract: Non-volatile memory device with polysilicon spacer and method of forming the same. A dielectric layer lines a sidewall of a polysilicon gate. A polysilicon spacer is patterned on the dielectric layer adjacent to the sidewall of the polysilicon gate. A protection spacer is patterned on the dielectric layer and disposed on the polysilicon spacer adjacent to the sidewall of the conductive gate for preventing a shortage path between the polysilicon gate and the polysilicon spacer during a subsequent silicidation process.Type: GrantFiled: December 19, 2006Date of Patent: May 11, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tzyh-Cheang Lee, Jiunn-Ren Hwang, Tsung-Lin Lee
-
Patent number: 7713852Abstract: A semiconductor method includes thermally treating at least a portion of a substrate so as to generate a plurality of vacancies in a region at a depth substantially near to a surface of the substrate. The substrate is then quenched so as to substantially maintain the vacancies in the region substantially near to the surface of the substrate.Type: GrantFiled: June 12, 2007Date of Patent: May 11, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Pu-Fang Chen
-
Patent number: 7713380Abstract: A method for preventing the formation of contaminating polymeric films on the backsides of semiconductor substrates includes providing an oxygen-impregnated focus ring and/or an oxygen-impregnated chuck that releases oxygen during etching operations. The method further provides delivering oxygen gas to the substrate by mixing oxygen in the cooling gas mixture, maintaining the focus ring at a temperature no greater than the substrate temperature during etching and cleaning the substrate using a two step plasma cleaning sequence that includes suspending the substrate above the chuck.Type: GrantFiled: January 27, 2004Date of Patent: May 11, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Huang-Ming Chen, Chun-Li Chou, Chao-Cheng Chen, Hun-Jan Tao
-
Patent number: 7714443Abstract: An interconnect structure includes at least a first interconnect layer and a second interconnect layer. Each of the first and second interconnect layers has a pad structure and each pad structure has a respective pad density. The pad density of the pad structure of the second interconnect layer is different from the pad density of the pad structure of the first interconnect layer. The pad structures of the first and second interconnect layers are connected to each other.Type: GrantFiled: July 19, 2006Date of Patent: May 11, 2010Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsien-Wei Chen, Anbiarshy Wu, Shih-Hsun Hsu, Shang-Yun Hou, Hsueh-Chung Chen, Shin-Puu Jeng