Patents Assigned to Taiwan Semiconductors Manufacturing Co., Ltd
-
Patent number: 10475839Abstract: A semiconductor device includes a semiconductor substrate, a radiation-sensing region, at least one isolation structure, and a doped passivation layer. The radiation-sensing region is present in the semiconductor substrate. The isolation structure is present in the semiconductor substrate and adjacent to the radiation-sensing region. The doped passivation layer at least partially surrounds the isolation structure in a substantially conformal manner.Type: GrantFiled: December 18, 2017Date of Patent: November 12, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tsung-Han Tsai, Yun-Wei Cheng, Kuo-Cheng Lee, Chun-Hao Chou, Yung-Lung Hsu
-
Patent number: 10475895Abstract: A semiconductor device includes a substrate, a first dielectric layer, a first device and a second device. The first dielectric layer is disposed on the substrate. The first device is disposed on the first dielectric layer on a first region of the substrate, and includes two first spacers, a second dielectric layer and a first gate structure. The first spacers are separated to form a first trench. The second dielectric layer is disposed on side surfaces and a bottom surface of the first trench. The first gate structure is disposed on the second dielectric layer. The second device is disposed on a second region of the substrate, and includes two second spacers and a second gate structure. The second spacers are disposed on the first dielectric layer and are separated to form a second trench. The second gate structure is disposed on the substrate within the second trench.Type: GrantFiled: June 21, 2017Date of Patent: November 12, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Che Chiang, Ju-Yuan Tzeng, Chun-Sheng Liang, Shu-Hui Wang, Chih-Yang Yeh, Jeng-ya David Yeh
-
Patent number: 10475731Abstract: A package includes a chip formed in a first area of the package and a molding compound formed in a second area of the package adjacent to the first area. A first polymer layer is formed on the chip and the molding compound, a second polymer layer is formed on the first polymer layer, and a plurality of interconnect structures is formed between the first polymer layer and the second polymer layer. A metal-insulator-metal (MIM) capacitor is formed on the second polymer layer and electrically coupled to at least one of the plurality of interconnect structures. A metal bump is formed over and electrically coupled to at least one of the plurality of interconnect structures.Type: GrantFiled: April 1, 2019Date of Patent: November 12, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shuo-Mao Chen, Der-Chyang Yeh, Chiung-Han Yeh
-
Patent number: 10475908Abstract: A semiconductor device includes a channel region, a source region having a first type semiconductor and a drain region having a second type semiconductor on opposing sides of the channel region. A gate stack is disposed over the channel region. A low-k spacer is disposed over the source region and abreast the gate stack. The source region includes a first type dopant, and the drain region includes a second type dopant. A pocket is disposed between the channel region and the source region. The pocket has the first type semiconductor and a higher first type dopant concentration than a first type dopant concentration of the source region.Type: GrantFiled: July 26, 2017Date of Patent: November 12, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan Afzalian
-
Patent number: 10475793Abstract: A capacitor cell is provided. A first PMOS transistor is coupled between a power supply and a first node, having a gate coupled to a second node. A first NMOS transistor coupled between a ground and the second node, having a gate coupled to the first node. A second PMOS transistor, having a drain coupled to the second node, a gate coupled to the second node, and a source coupled to the power supply or the first node. A second NMOS transistor, having a drain coupled to the first node, a gate coupled to the first node, and a source coupled to the ground or the second node.Type: GrantFiled: April 24, 2017Date of Patent: November 12, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chien-Yao Huang, Wun-Jie Lin, Chia-Wei Hsu, Yu-Ti Su
-
Patent number: 10475490Abstract: A memory device includes memory cells and a refresh module. The memory cells are coupled to a bit line, in which at least one memory cell of the memory cells is configured to store predetermined data. The refresh module is configured to refresh the at least one memory cell if a target memory cell of the memory cells is programmed or erased, in order to keep at least one cell current of the at least one memory cell away from a predetermined verify current level.Type: GrantFiled: October 9, 2017Date of Patent: November 12, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yue-Der Chih, Cheng-Hsiung Kuo, Gu-Huan Li, Chien-Yin Liu
-
Patent number: 10473616Abstract: The present disclosure provides a bio-field effect transistor (BioFET) device and methods of fabricating a BioFET and a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device includes a gate structure disposed on a first surface of a substrate and an interface layer formed on a second surface of the substrate. The substrate is thinned from the second surface to expose a channel region before forming the interface layer.Type: GrantFiled: July 14, 2017Date of Patent: November 12, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yi-Shao Liu, Chun-Ren Cheng, Ching-Ray Chen, Yi-Hsien Chang, Fei-Lung Lai, Chun-Wen Cheng
-
Patent number: 10475835Abstract: A semiconductor device structure for sensing an incident light includes a substrate, a wiring structure, and at least one passivation layer. The substrate has a device. The at least one passivation layer is disposed above the wiring structure. The at least one passivation layer includes a plurality of microstructures, and each of the microstructures has a cross-section in a shape of a triangle, trapezoid or arc. The wiring structure is disposed below the at least one passivation layer. A method for manufacturing the semiconductor device structure is also provided.Type: GrantFiled: September 5, 2016Date of Patent: November 12, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yi-Ping Pan, Hung-Jen Hsu
-
Patent number: 10475805Abstract: In some embodiments, a semiconductor substrate includes first and second source/drain regions which are separated from one another by a channel region. The channel region includes a first portion adjacent to the first source/drain region and a second portion adjacent the second source/drain region. A select gate is spaced over the first portion of the channel region and is separated from the first portion of the channel region by a select gate dielectric. A memory gate is spaced over the second portion of the channel region and is separated from the second portion of the channel region by a charge-trapping dielectric structure. The charge-trapping dielectric structure extends upwardly alongside the memory gate to separate neighboring sidewalls of the select gate and memory gate from one another. An oxide spacer or nitride-free spacer is arranged in a sidewall recess of the charge-trapping dielectric structure nearest the second source/drain region.Type: GrantFiled: April 29, 2019Date of Patent: November 12, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei Cheng Wu, Jui-Tsung Lien
-
Patent number: 10475762Abstract: A 3DIC structure includes a die, a conductive terminal, and a dielectric structure. The die is bonded to a carrier through a bonding film. The conductive terminal is disposed over and electrically connected to the die. The dielectric structure comprises a first dielectric layer and a second dielectric layer. The first dielectric layer is disposed laterally aside the die. The second dielectric layer is disposed between the first dielectric layer and the bonding film, and between the die and the boding film. A second edge of the second dielectric layer is more flat than a first edge of the first dielectric layer.Type: GrantFiled: May 17, 2018Date of Patent: November 12, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Sung-Feng Yeh, Hsien-Wei Chen, Ming-Fa Chen
-
Patent number: 10475877Abstract: A multi-terminal inductor and method for forming the multi-terminal inductor are provided. In some embodiments, an interconnect structure is arranged over a semiconductor substrate. A passivation layer is arranged over the interconnect structure. A first magnetic layer is arranged over the passivation layer, and a conductive wire laterally extends from a first input/output (I/O) bond structure at a first location to a second I/O bond structure at a second location. A third I/O bond structure branches off of the conductive wire at a third location between the first location and the second location. A connection between the third I/O bond structure and the first I/O bond structure has a first inductance. Alternatively, a connection between the first I/O bond structure and the second I/O bond structure has a second inductance different than the first inductance.Type: GrantFiled: August 21, 2018Date of Patent: November 12, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ching-Chung Hsu, Chung-Long Chang, Tsung-Yu Yang, Hung-Chi Li, Cheng-Chieh Hsieh, Che-Yung Lin, Grace Chang
-
Patent number: 10475897Abstract: In a method of forming a Group III-V semiconductor layer on a Si substrate, a first source gas containing a Group V element is supplied to a surface of the Si substrate while heating the substrate at a first temperature, thereby terminating the Si surface with the Group V element. Then, a second source gas containing a Group III element is supplied to the surface while heating the substrate at a second temperature, thereby forming a nucleation layer directly on the surface of the Si substrate. After the nucleation layer is formed, the supply of the second source gas is stopped and the substrate is annealed at a third temperature while the first source gas being supplied, thereby foaming a seed layer. After the annealing, the second source gas is supplied while heating the substrate at a fourth temperature, thereby forming a body III-V layer semiconductor on the seed layer.Type: GrantFiled: December 7, 2017Date of Patent: November 12, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Mark Van Dal, Matthias Passlack, Martin Christopher Holland
-
Patent number: 10475758Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate having a first surface, a second surface opposing the first surface, and sidewalls defining a recess that passes through the semiconductor substrate. A first interconnect layer is within a first dielectric structure disposed along the second surface, and a bonding pad is in the recess and extends to the first interconnect layer. A dielectric filling layer is also within the recess. The dielectric filling layer has an opening over a portion of the bonding pad and a curved upper surface over the bonding pad. A nickel layer is over the bonding pad and in the opening.Type: GrantFiled: January 26, 2018Date of Patent: November 12, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ming-Hsien Yang, Ching-Chun Wang, Dun-Nian Yaung, Feng-Chi Hung, Sin-Yao Huang
-
Publication number: 20190341322Abstract: A semiconductor package includes an encapsulated semiconductor device, a redistribution structure, and a protection layer. The encapsulated semiconductor device includes a semiconductor device and an encapsulating material encapsulating the semiconductor device. The redistribution structure is disposed on the encapsulated semiconductor device and includes a dielectric layer and a redistribution circuit layer electrically connected to the semiconductor device. The protection layer at least covers the dielectric layer, wherein an oxygen permeability or a water vapor permeability of the protection layer is substantially lower than an oxygen permeability or a vapor permeability of the dielectric layer.Type: ApplicationFiled: July 22, 2019Publication date: November 7, 2019Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shih-Hao Tseng, Hung-Jui Kuo, Ming-Che Ho, Chia-Hung Liu
-
Publication number: 20190341294Abstract: The present disclosure relates to a semiconductor device and a manufacturing method, and more particularly to a semiconductor device having an enhanced gap fill layer in trenches. The present disclosure provides a novel gap fill layer formed using a multi-step deposition and in-situ treatment process. The deposition process can be a flowable chemical vapor deposition (FCVD) utilizing one or more assist gases and molecules of low reactive sticking coefficient (RSC). The treatment process can be an in-situ process after the deposition process and includes exposing the deposited gap fill layer to plasma activated assist gas. The assist gas can be formed of ammonia. The low RSC molecule can be formed of trisilylamin (TSA) or perhydropolysilazane (PHPS).Type: ApplicationFiled: July 22, 2019Publication date: November 7, 2019Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jian-Shiou Huang, Bang-Tai Tang, Chih-Tang Peng, Tai-Chun Huang, Yen-Chun Huang
-
Publication number: 20190341543Abstract: A method includes forming in sequence a bottom magnetic layer, a tunnel barrier layer, a top magnetic layer, and a top electrode layer over a bottom electrode layer; performing a first etching process to recess the top electrode layer, in which the first etching process stops before the top magnetic layer is etched; performing a second etching process to pattern the top electrode layer as a top electrode and the top magnetic layer as a patterned top magnetic layer, in which the second etching process stops before the bottom magnetic layer is etched; forming a first spacer around the top electrode and the patterned top magnetic layer; and after forming the first spacer, performing a third etching process to pattern the tunnel barrier layer as a patterned tunnel barrier layer and the bottom magnetic layer as a patterned bottom magnetic layer.Type: ApplicationFiled: July 15, 2019Publication date: November 7, 2019Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Hao LIAO, Chih-Wei LU, Hsi-Wen TIEN, Pin-Ren DAI, Chung-Ju LEE
-
Publication number: 20190341466Abstract: The present disclosure is directed to formation of a low-k spacer. For example, the present disclosure includes an exemplary method of forming the low-k spacer. The method includes depositing the low-k spacer and subsequently treating the low-k spacer with a plasma and/or a thermal anneal. The low-k spacer can be deposited on a structure protruding from the substrate. The plasma and/or thermal anneal treatment on the low-k spacer can reduce the etch rates of the spacer so that the spacer is etched less in subsequent etching or cleaning processes.Type: ApplicationFiled: July 22, 2019Publication date: November 7, 2019Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsiu-Yu KANG, Hong-Wei Chen
-
Patent number: 10468275Abstract: A method includes holding a semiconductor substrate by a substrate holder of an electrochemical apparatus. The electrochemical apparatus includes a reaction cell and a counter electrode, and the semiconductor substrate has an exposed surface containing germanium, silicon, silicon germanium or any of III-V elements. The exposed surface of the semiconductor substrate is immersed in an electrolyte bath in the reaction cell. A portion of the semiconductor substrate is removed by supplying a first current to the counter electrode and a second current to the semiconductor substrate. The second current has a negative bias. The negative bias is smaller than 0V and equal to or larger than minus 5V.Type: GrantFiled: September 27, 2017Date of Patent: November 5, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Andrew Joseph Kelly, Yusuke Oniki
-
Patent number: 10466810Abstract: Converter and conversion method for converting a click position of a flat panel display into a light pen simulated signal for a semiconductor manufacturing machine are provided. A converter includes a first connector, a second connector, and a controller. The first connector is configured to relay the click position of the flat panel display with a first display resolution. The second connector is configured to relay a horizontal synchronization signal and a vertical synchronization signal from the semiconductor manufacturing machine and a second display resolution. The controller converts the click position into a light pen position according to the first and second display resolutions, and provides the light pen simulated signal to the semiconductor manufacturing machine through the second connector according to the light pen position, the horizontal synchronization signal and the vertical synchronization signal.Type: GrantFiled: April 24, 2017Date of Patent: November 5, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ming-Sze Chen, Chin-Shen Hsieh
-
Patent number: 10468379Abstract: A 3DIC structure includes a first die and a second die on a substrate and a bonding die. The boding die is electrically bonded to the first die and the second die. The bonding die covers a portion of a top surface of a scribe region between the first die and the second die.Type: GrantFiled: May 15, 2018Date of Patent: November 5, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tzuan-Horng Liu, Hsien-Wei Chen, Jiun-Heng Wang, Ming-Fa Chen