Patents Assigned to Taiwan Semicondutor Manufacturing Company
  • Publication number: 20240038721
    Abstract: A semiconductor device includes a plurality of top semiconductor dies. Each of the plurality of top semiconductor dies can be bonded to a bottom semiconductor die. The semiconductor device includes a redistribution structure disposed opposite the plurality of top semiconductor dies from the plurality of bottom semiconductor dies and comprising a plurality of interconnect structures. A top semiconductor die can connect to another top semiconductor die via a first subset of the plurality of interconnect structures.
    Type: Application
    Filed: July 27, 2022
    Publication date: February 1, 2024
    Applicant: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventor: Ming-Fa Chen
  • Publication number: 20240021600
    Abstract: Systems and methods for an integrated circuit layout is disclosed. The integrated circuit layout includes a first block including multiple first cells, each of which has a first cell height, and a second block including multiple second cells, each of which has a second cell height. The first block is disposed next to the second block with a spacing that is either equal to zero or less than any of the first or second cell heights.
    Type: Application
    Filed: July 12, 2022
    Publication date: January 18, 2024
    Applicant: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Po-Hsien Yen, Jia-Hong Gao, Hui-Zhong Zhuang, Jung-Chan Yang
  • Publication number: 20240021560
    Abstract: A semiconductor device includes a first connector, a second connector, and a redistribution structure disposed between the first connector and the second connector. The redistribution structure includes a first connection tree electrically connecting the first connector to the second connector. The first connection tree includes a plurality of first conductive pads disposed in a plurality of respective levels, and a plurality of first via structures each disposed between adjacent ones of the plurality of first conductive pads. Any lateral end of each of the plurality of first conductive pads is spaced from the first connector within a first minimum pitch associated with the second connector.
    Type: Application
    Filed: July 14, 2022
    Publication date: January 18, 2024
    Applicant: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Ting-Yu Yeh, Han-Hsiang Huang, Chun-Hsien Wen, Chih-Wei Chang
  • Publication number: 20230027261
    Abstract: A method of fabricating a semiconductor device includes forming at least one fin on a substrate, a plurality of dummy gates over the at least one fin, and a sidewall spacer on the dummy gates. Source and drain regions are epitaxially formed contacting the at least one fin and laterally adjacent the dummy gates, where forming the source and drain regions leaves a void below the source and drain regions and adjacent the dummy gates. The dummy gates are replaced with active gates, each having a gate dielectric on the sidewall spacer and a gate electrode on the gate dielectric. A patterned layer is formed exposing a selected active gate of the active gates. A first etch is performed to remove exposed portions of the gate electrode of the selected active gate. A second etch is performed, after the first etch, to remove exposed portions of a gate dielectric of the selected active gate.
    Type: Application
    Filed: July 22, 2021
    Publication date: January 26, 2023
    Applicant: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Tzu Ang Chiang, Chun-Neng Lin, Jian-Jou Lian, Chieh-Wei Chen, Ming-Hsi Yeh, Po-Yuan Wang
  • Patent number: 11522073
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming semiconductor fins on a substrate. A first dummy gate is formed over the semiconductor fins. A recess is formed in the first dummy gate, and the recess is disposed between the semiconductor fins. A dummy fin material is formed in the recess. A portion of the dummy fin material is removed to expose an upper surface of the first dummy gate and to form a dummy fin. A second dummy gate is formed on the exposed upper surface of the first dummy gate.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: December 6, 2022
    Assignee: TAIWAN SEMICONDUTOR MANUFACTURING COMPANY LIMITED
    Inventors: Shih-Yao Lin, Chih-Han Lin, Chen-Ping Chen, Kuei-Yu Kao, Hsiao Wen Lee
  • Patent number: 11201084
    Abstract: A method of forming a semiconductor device includes forming a first dummy gate structure and a second dummy gate structure over a fin protruding above a substrate, where the first dummy gate structure and the second dummy gate structure are surrounded by a dielectric layer; and replacing the first dummy gate structure and the second dummy gate structure with a first metal gate and a second metal gate, respectively, where the replacing includes: removing the first and the second dummy gate structures to form a first recess and a second recess in the dielectric layer, respectively; forming a gate dielectric layer in the first recess and in the second recess; forming an N-type work function layer and a capping layer successively over the gate dielectric layer in the second recess but not in the first recess; and filling the first recess and the second recess with an electrically conductive material.
    Type: Grant
    Filed: August 23, 2019
    Date of Patent: December 14, 2021
    Assignee: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Chieh-Wei Chen, Jian-Jou Lian, Chun-Neng Lin, Tzu-Ang Chiang, Ming-Hsi Yeh
  • Publication number: 20210335674
    Abstract: A semiconductor device includes a first semiconductor fin extending along a first direction. The semiconductor device includes a second semiconductor fin also extending along the first direction. The semiconductor device includes a dielectric structure disposed between the first and second semiconductor fins. The semiconductor device includes a gate isolation structure vertically disposed above the dielectric structure. The semiconductor device includes a metal gate layer extending along a second direction perpendicular to the first direction, wherein the metal gate layer includes a first portion straddling the first semiconductor fin and a second portion straddling the second semiconductor fin. The gate isolation structure separates the first and second portions of the metal gate layer from each other and includes a bottom portion extending into the dielectric structure.
    Type: Application
    Filed: February 3, 2021
    Publication date: October 28, 2021
    Applicant: Taiwan Semicondutor Manufacturing Company Limited
    Inventors: Shih-Yao Lin, Chih-Han Lin, Shu-Yuan Ku, Shu-Uei Jang, Ya-Yi Tsai, I-Wei Yang
  • Patent number: 10847426
    Abstract: Provided are FinFET devices and methods of forming the same. A FinFET device includes a substrate, a first gate strip and a second gate strip. The substrate has at least one first fin in a first region, at least one second fin in a second region and an isolation layer covering lower portions of the first and second fins. The first fin includes a first material layer and a second material layer over the first material layer, and the interface between the first material layer and the second material layer is uneven. The first gate strip is disposed across the first fin. The second gate strip is disposed across the second fin.
    Type: Grant
    Filed: October 28, 2018
    Date of Patent: November 24, 2020
    Assignee: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Jui-Chien Huang, Kuo-Cheng Ching, Chun-Hsiung Lin, Pei-Hsun Wang
  • Patent number: 10510401
    Abstract: A semiconductor memory device comprising a plurality of memory cells configured to store digital data and an input multiplexer configured to enable the selection of a particular memory cell from the plurality of memory cells. The semiconductor memory device further comprises a read/write driver circuit configured to read data from the selected memory cell and write data to the selected memory cell, and a write logic block configured to provide logical control to the read/write driver circuit for writing data to the selected of memory cell. The read/write driver circuit may be coupled to the read/write input multiplexer by a data line and an inverted data line and the read and the write operations to the selected memory cell occur over the same data line and inverted data line.
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semicondutor Manufacturing Company Limited
    Inventors: Chien-Yuan Chen, Che-Ju Yeh, Hau-Tai Shieh, Cheng-Hung Lee, Hung-Jen Liao, Sahil Preet Singh, Manish Arora, Hemant Patel, Li-Wen Wang
  • Patent number: 10283171
    Abstract: An apparatus includes a first tier, a second tier and a memory. The second tier is vertically stacked on the first tier. The memory includes a column of memory bit cells. A first portion of the column of memory bit cells is on the first tier. A second portion of the column of memory bit cells is on the second tier.
    Type: Grant
    Filed: March 30, 2015
    Date of Patent: May 7, 2019
    Assignee: TAIWAN SEMICONDUTOR MANUFACTURING COMPANY, LTD.
    Inventor: Shyh-An Chi
  • Patent number: 10284190
    Abstract: A voltage detector includes a first node configured to have a first supply voltage, a second node configured to have a second supply voltage, and an output node. The voltage detector is configured to drive the output node to the first supply voltage in response to a difference between the first supply voltage and the second supply voltage exceeding a predetermined threshold voltage value.
    Type: Grant
    Filed: March 6, 2017
    Date of Patent: May 7, 2019
    Assignee: TAIWAN SEMICONDUTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Fu Tsai, Jen-Chou Tseng, Kuo-Ji Chen, Tzu-Heng Chang
  • Patent number: 10049931
    Abstract: A method of making a semiconductor device is provided including forming a first opening and a second opening in a first surface of a substrate. A conductive material is formed in the first opening and in the second opening and over the first surface in the first region of the substrate between the openings. A thickness of the substrate may be reduced from a second surface of the substrate, opposite the first surface, to a third surface opposite the first surface which exposes the conductive material in the first opening and the conductive material in the second opening. A light emitting diode (LED) device is connected to the third surface of the substrate.
    Type: Grant
    Filed: March 14, 2016
    Date of Patent: August 14, 2018
    Assignee: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Hung-Pin Chang, Yung-Chi Lin, Chia-Lin Yu, Jui-Pin Hung, Chien Ling Hwang
  • Patent number: 9035445
    Abstract: A method includes providing a substrate having a seal ring region and a circuit region, forming a seal ring structure over the seal ring region, forming a first frontside passivation layer above the seal ring structure, etching a frontside aperture in the first frontside passivation layer adjacent to an exterior portion of the seal ring structure, forming a frontside metal pad in the frontside aperture to couple the frontside metal pad to the exterior portion of the seal ring structure, forming a first backside passivation layer below the seal ring structure, etching a backside aperture in the first backside passivation layer adjacent to the exterior portion of the seal ring structure, and forming a backside metal pad in the backside aperture to couple the backside metal pad to the exterior portion of the seal ring structure. Semiconductor devices fabricated by such a method are also provided.
    Type: Grant
    Filed: September 23, 2012
    Date of Patent: May 19, 2015
    Assignee: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Jeng-Shyan Lin, Dun-Nian Yaung, Jen-Cheng Liu, Hsin-Hui Lee, Wen-De Wang, Shu-Ting Tsai
  • Publication number: 20140264824
    Abstract: Methods and apparatus are disclosed which reduce the stress concentration at the redistribution layers (RDLs) of a package device. A package device may comprise a seed layer above a passivation layer, covering an opening of the passivation layer, and covering and in contact with a contact pad. A RDL is formed above the passivation layer, above and in contact with the seed layer, covering the opening of the passivation layer, and electrically connected to the contact pad through the seed layer. The RDL has an end portion with a surface that is smooth without a right angle. The surface of the end portion of the RDL may have an obtuse angle, or a curved surface.
    Type: Application
    Filed: May 23, 2013
    Publication date: September 18, 2014
    Applicant: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Chun-Lin Lu, Hsien-Wei Chen, Kai-Chiang Wu, Hung-Jui Kuo
  • Publication number: 20130187122
    Abstract: The present disclosure involves a method of fabricating a lighting apparatus. The method includes forming a first III-V group compound layer over a substrate. The first III-V group compound layer has a first type of conductivity. A multiple quantum well (MQW) layer is formed over the first III-V group compound layer. A second III-V group compound layer is then formed over the MQW layer. The second III-V group compound layer has a second type of conductivity different from the first type of conductivity. Thereafter, a plurality of conductive components is formed over the second III-V group compound layer. A light-reflective layer is then formed over the second III-V group compound layer and over the conductive components. The conductive components each have better adhesive and electrical conduction properties than the light-reflective layer.
    Type: Application
    Filed: January 19, 2012
    Publication date: July 25, 2013
    Applicant: TAIWAN SEMICONDUTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yea-Chen Lee, Jung-Gang Chu, Ching-Hua Chiu, Hung-Wen Huang
  • Patent number: 7678694
    Abstract: A method for fabricating a semiconductor device having a silicided gate that is directed to forming the silicided structures while maintaining gate-dielectric integrity. Initially, a gate structure has, preferably, a poly gate electrode separated from a substrate by a gate dielectric and a metal layer is then deposited over at least the poly gate electrode. The fabrication environment is placed at an elevated temperature. The gate structure may be one of two gate structures included in a dual gate device such as a CMOS device, in which case the respective gates may be formed at different heights (thicknesses) to insure that the silicide forms to the proper phase. The source and drain regions are preferably silicided as well, but in a separate process performed while the gate electrodes are protected by, for example a cap of photoresist or a hardmask structure.
    Type: Grant
    Filed: April 18, 2007
    Date of Patent: March 16, 2010
    Assignee: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Mei-Yun Wang, Cheng-Chen Calvin Hsueh
  • Publication number: 20060140014
    Abstract: A memory cell for a static random access memory (SRAM) is disclosed that can be programmed to have a one-bit cell or a multi-bit cell (i.e., including two or more latches) according to a desired amount of cell current. For lower current needs, the memory cell can incorporate a single bit-element, while for higher current needs the memory cell can incorporate two or more bit-elements. An exemplary static random access memory device includes a memory cell having one or more bit-elements, such as bistable latches. Access devices, such as pass transistors, are coupled between each of the bit-elements and a bit line. A word line is coupled to the control terminal of each of the pass transistors for controlling communication between the bit-elements and the bit line.
    Type: Application
    Filed: December 23, 2004
    Publication date: June 29, 2006
    Applicant: TAIWAN SEMICONDUTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hui Hsieh, Kun Lung Chen
  • Patent number: 6090696
    Abstract: A process used to create a non-smooth, top surface topography, for a semiconductor substrate, needed to improve the adhesion between a protective molding compound, and the underlying top surface of the semiconductor substrate, has been developed. The process features the creation of the non-smooth, top surface topography, including either: recessed, or etched back, copper damascene structures, in an insulator layer; or copper damascene structures, in a recessed, or etched back, insulator layer. The recessing of the copper damascene structures, or of the insulator layer, is accomplished via selective, dry or wet etch procedures. After formation of a gold wire bond, on the top surface of a copper damascene structure, a protective molding compound is applied, to the underlying, non-smooth, top surface topography.
    Type: Grant
    Filed: October 20, 1999
    Date of Patent: July 18, 2000
    Assignee: Taiwan Semicondutor Manufacturing Company
    Inventors: Syun-Ming Jang, Mong-Song Liang
  • Patent number: 5914512
    Abstract: A structure for forming an ohmic contact to the drain of a MOSFET in a stacked capacitor DRAM cell is described. The contact is formed by making an opening in the upper cell plate of the cells capacitor and contacting the storage plate through this opening with a conductive plug, preferably a tungsten plug. The plug is formed concurrent with the conventional contact and first metal wiring processing of the DRAM. The contact is used in DRAM test arrays for characterizing the quality of MOSFET gate insulator as well as the performance characteristics of the MOSFET itself. Connection to the conductive plug is made with first metal wiring. The test structures can be built at any position within the array and since they are located above the polysilicon bitline/wordline structure, the metal connection lines for the contacts do not interfere with the structure of the test array itself other than the sacrifice of the test cell from the array.
    Type: Grant
    Filed: May 20, 1998
    Date of Patent: June 22, 1999
    Assignee: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventor: Julie Huang