Patents Assigned to Taiwna Semiconductor Manufacturing Company, Ltd.
  • Publication number: 20150027552
    Abstract: A fluid supply system includes a pressure tank configured to contain a pressurized gas and a fluid, a delivery point configured to be connected to a point of use, a recirculation piping connecting the pressure tank to the delivery point, and a return pump connected to the recirculation piping. The recirculation piping defines a circulation path for the fluid from the pressure tank through the delivery point and back to the pressure tank. The return pump is downstream of the delivery point and upstream of the pressure tank in the circulation path.
    Type: Application
    Filed: July 23, 2013
    Publication date: January 29, 2015
    Applicant: Taiwna Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Jung HSU, Yung-Ti HUNG, Chun-Feng HSU, Nan-Peng CHENG