Patents Assigned to Takenaka Corporation, A Japanese Corporation
  • Damping support structure
    Patent number: 4976415
    Abstract: A damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported by a support deck suspended to be horizontally displaceable. Linear motors are actuated in response to vibrations of the apparatus table detected by vibration sensors. The apparatus table is thus displaceable relative to a stationary section, to be safeguarded against the vibrations.
    Type: Grant
    Filed: June 1, 1989
    Date of Patent: December 11, 1990
    Assignee: Takenaka Corporation, A Japanese Corporation
    Inventors: Nobuyoshi Murai, Yoshinori Takahashi, Kazuyoshi Katayama