Abstract: A liquid applying apparatus includes a rotary member having a disk table in which a substrate to be applied with liquid is placed; a cover member movable above the disk table and operable to define a closed space in combination with the disk table; an elevating mechanism which elevates up and down the cover member; a sealing arrangement provided between the disk table and the cover member to seal the closed space, the sealing arrangement including: a resilient sealing ring having a specified sectional size; a ring accommodation annular groove formed in either a top surface of a periphery of the disk table or an underside surface of a periphery of the cover member, the ring accommodation annular groove having a sectional size greater than the sectional size of the sealing ring and being operable to accommodate the sealing ring; a ring pressing annular ridge formed on either a top surface of a periphery of the disk table or an underside surface of a periphery of the cover member, the ring pressing annular ridge

Abstract: A robot arm device includes an expandable arm portion including an arm member, a forearm arm member, and a hand member. The arm member is fixedly attached with an arm drive wheel which is driven by a first drive motor. The arm member carries a transmission wheel disposed coaxially with the arm drive wheel and rotatable independently from the arm drive wheel and a forearm drive wheel disposed at a leading end of the arm member and rotatable independently from the arm member and fixedly connected at a base end of the forearm member. The forearm member carries a stationary wheel disposed coaxially with the forearm drive wheel and fixedly connected with the arm member and a hand drive wheel disposed at a leading end of the forearm member. The forearm drive wheel is drivingly rotated by a second drive motor in addition to a relative rotation due to a rotation of the arm member.