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Patents
Patents Assigned to Taxmo Co., Ltd.
Patents Assigned to Taxmo Co., Ltd.
Diamond pen type marking device for substrates
Patent number:
4954842
Abstract:
This invention relates to a pen type marking device whose marking pen tip is made of diamond and which is used for marking necessary for production control and quality control of substrates such as wafers.
Type:
Grant
Filed:
July 11, 1988
Date of Patent:
September 4, 1990
Assignee:
Taxmo Co., Ltd.
Inventors:
Isao Hashimoto, Tsuyoshi Hidehira