Abstract: A joining apparatus includes a table, a pressurizing mechanism, a laser light source that emits laser light, and a controller. The table has permeability to the laser light. Two joining targets are to be placed on the table while a first metal layer and a second metal layer face each other. The pressurizing mechanism includes a diaphragm, and is capable of applying pressure to a back surface of the joining target using the diaphragm from an opposite side to the table. The controller brings the first metal layer and the second metal layer into contact with each other by applying pressure to the back surface of the joining target while the two joining targets are placed on the table, and while maintaining the resultant state, applies the laser light to a place of contact between the first metal layer and the second metal layer through the table.

Abstract: An alignment mechanism comprises a rotary unit 61 with a first rotary axis 61c, three power transmission mechanisms 62, and three alignment action units 63. Each power transmission mechanism 62 comprises a first arm 621 and a second arm 622. The first arm 621 includes a first end 621a pivotably supported at a corresponding one of three different positions P11 to P13, and a second end 621b on the opposite side of the first end 621a. The second arm 622 includes a second rotary axis 622c and is pivotably supported on the second end 621b of the first arm 621 at a position different from the second rotary axis 622c. The alignment action units 63 are connected to corresponding second arms. The second rotary axes 622c are at three positions P21 to P23 separated from the rotary unit 61 toward three different directions centered on the first rotary axis 61c.

Abstract: A bonder includes a first chuck unit 1A, a second chuck unit 1B, a first base 21A, a second base 21B, and a first floating mechanism 3A. The first chuck unit 1A and the second chuck unit 1B are chuck units in a pair including respective suction surfaces for suction of bonding targets and are arranged while respective suction surfaces 11a and 11b face each other. The first base 21A and the second base 21B support the first chuck unit 1A and the second chuck unit 1B respectively. The first floating mechanism 3A applies gas pressure to a back surface 12a of the first chuck unit 1A to float the first chuck unit 1A from the first base 21A, thereby moving the suction surface 11a of the first chuck unit 1A toward the suction surface 11b of the second chuck unit 1B.

Abstract: A method for producing a pellicle according to the one embodiment of the present invention produces a pellicle including a pellicle film and a pellicle frame supporting an outer peripheral portion of the pellicle film. The method includes forming the pellicle film on a substrate, and bonding a pressure-sensitive adhesive sheet, that is elastic and has a pressure-sensitive adhesive force thereof decreased upon receipt of external stimulation, to each of two surfaces of the substrate; making a notch inside a part of the substrate, the part having the pressure-sensitive adhesive sheets bonded thereto; separating a substrate outer peripheral portion outer to the notch of the substrate, in a state where the pressure-sensitive adhesive sheets are bonded to the substrate, to form a pellicle frame; and stimulating the pressure-sensitive adhesive sheets to peel off the pressure-sensitive adhesive sheets.

Abstract: A bonder includes a first chuck unit 1A, a second chuck unit 1B, a first base 21A, a second base 21B, and a first floating mechanism 3A. The first chuck unit 1A and the second chuck unit 1B are chuck units in a pair including respective suction surfaces for suction of bonding targets and are arranged while respective suction surfaces 11a and 11b face each other. The first base 21A and the second base 21B support the first chuck unit 1A and the second chuck unit 1B respectively. The first floating mechanism 3A applies gas pressure to a back surface 12a of the first chuck unit 1A to float the first chuck unit 1A from the first base 21A, thereby moving the suction surface 11a of the first chuck unit 1A toward the suction surface 11b of the second chuck unit 1B.

Abstract: An ejection device includes a nozzle that ejects an ejection fluid, an ejection-side pump, a driving-side pump, and a heating unit. The ejection-side pump includes a pressure transmitting member, and an ejection chamber and a driving chamber adjacent to each other across the pressure transmitting member. The ejection chamber is filled with the ejection fluid. The driving chamber is filled with a driving fluid. The driving-side pump is a pump that applies pressure to the driving fluid. The pressure transmitting member transmits the pressure applied to the driving fluid to the ejection fluid in the ejection chamber. The heating unit heats at least the ejection-side pump while the driving-side pump remains unheated.

Abstract: An alignment mechanism comprises a rotary unit 61 with a first rotary axis 61c, three power transmission mechanisms 62, and three alignment action units 63. Each power transmission mechanism 62 comprises a first arm 621 and a second arm 622. The first arm 621 includes a first end 621a pivotably supported at a corresponding one of three different positions P11 to P13, and a second end 621b on the opposite side of the first end 621a. The second arm 622 includes a second rotary axis 622c and is pivotably supported on the second end 621b of the first arm 621 at a position different from the second rotary axis 622c. The alignment action units 63 are connected to corresponding second arms. The second rotary axes 622c are at three positions P21 to P23 separated from the rotary unit 61 toward three different directions centered on the first rotary axis 61c.

Abstract: This coating device according to the present invention comprises a slit nozzle (30); a liquid supply path (10) for a coating liquid; a pneumatic transportation device (20) for transporting the coating liquid pneumatically; a liquid supply valve (50) for opening/shutting the liquid supply path (10); a pump (40) configured so as to be capable of suctioning the coating liquid inside the slit nozzle (30); a residual-pressure removal means (80) for removing the residual pressure inside the slit nozzle (30); and a control section (70) for controlling the operation of the liquid supply valve (50), the pump (40), and the residual-pressure removal means (80); wherein the coating liquid remaining inside the slit nozzle (30) is suctioned at the end of coating after pumping of the coating liquid is stopped and the residual pressure inside the slit nozzle (30) is removed. With this configuration the coating device improves responsive at the end of the coating without a complicated control procedure.

Abstract: A method for producing a pellicle according to the one embodiment of the present invention produces a pellicle including a pellicle film and a pellicle frame supporting an outer peripheral portion of the pellicle film. The method includes forming the pellicle film on a substrate, and bonding a pressure-sensitive adhesive sheet, that is elastic and has a pressure-sensitive adhesive force thereof decreased upon receipt of external stimulation, to each of two surfaces of the substrate; making a notch inside a part of the substrate, the part having the pressure-sensitive adhesive sheets bonded thereto; separating a substrate outer peripheral portion outer to the notch of the substrate, in a state where the pressure-sensitive adhesive sheets are bonded to the substrate, to form a pellicle frame; and stimulating the pressure-sensitive adhesive sheets to peel off the pressure-sensitive adhesive sheets.

Abstract: An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly. Arms (61 to 63) of a transmission arm unit (6) are provided for transmitting an operation of a first parallel link (4) to a second parallel link (5). An operation of the first parallel link (4) is transmitted to the second parallel link (5) so that an angle between an arm (53) and an arm (52) in the second parallel link(5) always coincides with an angle between an arm (41) and an arm (42) in the first parallel arm unit (4).

Abstract: Provided is a phosphor for a dispersion-type EL that may be manufactured in a simple process and may provide stable, high brightness and light emission efficiency. The phosphor for a dispersion-type EL according to the present invention includes a mixture of an electron-accepting phosphor particle (4A) and an electron-donating phosphor particle (4B). The electron-accepting phosphor particle (4A) includes a base particle and an acceptor element added thereto, and the electron-donating phosphor particle (4B) includes a base particle and a donor element added thereto. For example, the base particle is a ZnS particle, the acceptor element is Cu, and the donor element is Cl or Al.

Abstract: The present invention provides a transfer robot which has a simple structure and a small occupied area in an operation. A transfer robot of the present invention includes a support member fixed to a side wall or the like, a transfer arm by which a hand member is held capable of linear movement, and first and second link members. One end portions of the first and second link members are rotatably linked to the support member, respectively. Another end portions of the first and second link members are rotatably linked to the transfer arm, respectively. The hand member holds/transfers a work. A rotational driving force applied to a linking portion between the support member and the first link member is transmitted to the transfer arm by a predetermined mechanism and linearly moves the hand member. The transfer arm moves by rotating the first link member or the second link member.

Abstract: This coating device according to the present invention comprises a slit nozzle (30); a liquid supply path (10) for a coating liquid; a pneumatic transportation device (20) for transporting the coating liquid pneumatically; a liquid supply valve (50) for opening/shutting the liquid supply path (10); a pump (40) configured so as to be capable of suctioning the coating liquid inside the slit nozzle (30); a residual-pressure removal means (80) for removing the residual pressure inside the slit nozzle (30); and a control section (70) for controlling the operation of the liquid supply valve (50), the pump (40), and the residual-pressure removal means (80); wherein the coating liquid remaining inside the slit nozzle (30) is suctioned at the end of coating after pumping of the coating liquid is stopped and the residual pressure inside the slit nozzle (30) is removed. With this configuration the coating device improves responsive at the end of the coating without a complicated control procedure.

Abstract: A substrate coating device (10) includes a precision stage (7), a nozzle (8), and conveyors (3 to 6 and 21). The precision stage (7) has a horizontal placement surface for placing a substrate W thereon and is configured to be reciprocable between an upstream end and a downstream end in a conveying direction. The conveyors (3 to 6 and 21) are configured to convey the substrate W in the conveying direction via the placement surface of the precision stage (7) in such manner that a surface of the substrate W is positioned in a horizontal plane. The intermediate conveyor (21) is liftable between a conveying position where a conveying surface of the intermediate conveyor is coincident with the placement surface of the stage and a non-conveying position where the conveying surface is positioned below the placement surface of the stage.

Abstract: The substrate coating device (10) includes a slit nozzle (1), a first camera (3), a second camera (4), a control section (5), a pump (8), and a pressure control chamber (9). The control section (5) controls the supply of the coating liquid from the pump (8) to the slit nozzle (1) in accordance with the result of comparison between a bead shape imaged by the first camera (3) and a reference shape. The control section (5) also controls the air pressure on the upstream side of the slit nozzle (1) by the pressure control chamber (9) in accordance with the result of comparison between a distance measured from an image taken by the second camera (4) and a reference distance.

Abstract: A film in a dry state is efficiently dissolved and removed. A film removing method includes steps of moving a nozzle head (10B) close to a soluble film (201) formed on a substrate (200), forming a liquid pool (302) of chemical liquid (300) between the nozzle head (10B) and the film (201) by continuously and simultaneously discharging and sucking the chemical liquid (300) from the nozzle head (10B), and horizontally moving the substrate (100) in a state in which the nozzle head (10B) and the surface of the film (201) are not contacted so as to relatively move the liquid pool (302) of the chemical liquid on the substrate (100).

Abstract: An object is to make it possible to adequately reduce the wafer transport time and to contribute to size-reduction of the semiconductor processing system. Two wafer supports (3, 4) on which wafers (100) are placed are arranged to be apart from each other by a distance (D) in a vertical direction . To transport two wafers (100) to respective loading stages (200A, 200B), first a wafer (100) placed on the lower wafer support (3) is subjected to correction of its position in its main plane, and the wafer supports (3, 4) are descended. After the wafer (100) placed on the wafer support (3) is loaded onto pins (211-213), another wafer (100) placed on the upper wafer support (4) is subjected to correction of its position in its main plane, and the wafer supports (3, 4) are descended.

Abstract: An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly. Arms (61 to 63) of a transmission arm unit (6) are provided for transmitting an operation of a first parallel link (4) to a second parallel link (5). An operation of the first parallel link (4) is transmitted to the second parallel link (5) so that an angle between an arm (53) and an arm (52) in the second parallel link(5) always coincides with an angle between an arm (41) and an arm (42) in the first parallel arm unit (4).

Abstract: A substrate coating device is provided which is capable of reducing non-uniform film thickness areas that take place in a coating start portion and a coating end portion during coating using a slit nozzle coater. The substrate coating device (10) includes at least a slider driving motor (4), a pump (8), a delivery state quantity measuring section (82), and a control section (5). The slider driving motor (4) scans a slit nozzle (1) over a substrate (100) at an established velocity relative to the substrate (100). The pump (8) controls the supply of the coating liquid to the slit nozzle (1). The delivery state quantity measuring section (82) is configured to measure a state quantity indicative of a delivery state of the coating liquid from the tip of the slit nozzle (1).

Abstract: A method for controlling a flow rate of a pump (10) transporting a liquid being driven by a drive system having a sliding portion, wherein a flow rate is maintained at a minute first flow rate (R1) at an early stage of operation of the pump (10); and subsequently the flow rate is increased to a steady second flow rate (R). With the method, at the early stage of operation of the pump (10), a state is established beforehand in which the pump (10) is kept stable at the minute first flow rate in order for the stick-slip phenomenon not to occur; and because the flow rate of the pump is increased from the state, transition from static friction to kinetic friction does not occur; and thus a disorderly flow rate of the pump (10) due to the stick-slip phenomenon of a motor (12) is suppressed. This makes it possible to attain a stable control of the flow rate at the early stage of operation of the pump (10).