Abstract: An object of the invention is to provide an EL phosphor laminate thin film and EL device which can emit light at a high luminance. The object is achieved by stacking a phosphor thin film and a dielectric thin film one on the other wherein the phosphor thin film comprises at least one compound selected from an alkaline earth thioaluminate, an alkaline earth thiogallate and an alkaline earth thioindate as a main component, and a rare earth element as a luminescence center, and the dielectric thin film comprises an alkaline earth-containing oxide and/or a titanium-containing oxide.

Abstract: A method of patterning at least one object layer, includes a step of forming a mask on the object layer, and a step of selectively etching the object layer using the mask. The mask is made of a magnetic metallic compound with a basic metal of nickel or cobalt containing at least group 3B element and/or group 5B element.