Abstract: Flexible seal assemblies having a relatively low torsional rigidity and high longitudinal flexure to thereby allow the flexible seal assembly to flex between adjacent components and maintain a seal, even when movement between adjacent components occurs, is described. In some embodiments, the flexible seal assembly includes one or more layers of metal matrix material, the metal matrix material being comprised of a plurality of short segments of thin wire arranged randomly and sintered together to form a semi-rigid sheet. The one or more layers of metal matrix material can be sandwiched between an upper casing and a lower casing of a metal alloy casing. In various embodiments, additional features are provided for helping to make sure the seal assembly stays together, such as spot welds formed through the seal assembly, an S-shaped casing, and a recess/protrusion feature provided on adjacent layers of metal matrix material.

Abstract: A one-way valve is provided. The valve provides a housing with a through hole having an upstream portion and a downstream portion. The upstream portion has a reduced diameter compared to the downstream portion. The housing contains a valve seat. A valve member, or poppet, moves within the through hole from a valve closed position and a valve open position. A low pressure facing side of the poppet engages an elastic member of a compression member that biases the poppet in the valve closed position. A high pressure facing side of the poppet engages a resilient metal seal in the form of an annular disc, which may have a generally wavy or undulating shape. The outer ends of the resilient metal seal are curved to releasably engages the valve seat.

Abstract: A metal O-ring is provided. The metal O-ring has a sidewall with an outer surface and an inner surface. The outer surface of the sidewall is machined to selectively thinning the thickness of the sidewall, such that the sidewall of the of the metal O-ring has a plurality of thicknesses equal to or less than a maximum thickness and equal to or more than a minimum thickness. Selectively thinning the sidewall by machining the outer surface allows for control of the elasticity of the metal O-ring. Controlling the elasticity of the metal O-ring, and potentially increasing the spring back, may provide for increased contract pressure at a sealing interface, which would facilitate sealing. The machined outer surface of the metal O-ring are generally machined to flat surfaces.

Abstract: Techniques for depositing a functionally integrated coating structure on a substrate are provided. An example method according to the disclosure includes receiving the substrate into a process chamber of a multi-process ion beam assisted deposition system, disposing the substrate in a first zone including a first evaporator species and a first ion beam, wherein the first evaporator species is Aluminum Oxide (Al2O3), disposing the substrate in a second zone including a second evaporator species and a second ion beam, wherein the second evaporator species is Yttrium Oxide (Y2O3), and disposing the substrate in a third zone including a third evaporator species and a third ion beam, wherein the third evaporator species is Yttrium Fluoride (YF3).

Abstract: A method of depositing material to manufacture an electrostatic chuck is provided. The method first deposits at least one layer of a first dielectric material on a handle using spin coating and/or direct spraying method. A functional electric layer is next deposited on the at least one layer of the first dielectric material. Finally, the electrostatic chuck if formed by depositing at least one layer of a second dielectric material on the functional electric layer and the first dielectric material using spin coating and/or direct spraying method.

Abstract: Flexible seal assemblies having a relatively low torsional rigidity and high longitudinal flexure to thereby allow the flexible seal assembly to flex between adjacent components and maintain a seal, even when movement between adjacent components occurs, is described. In some embodiments, the flexible seal assembly includes one or more layers of metal matrix material, the metal matrix material being comprised of a plurality of short segments of thin wire arranged randomly and sintered together to form a semi-rigid sheet. The one or more layers of metal matrix material can be sandwiched between an upper casing and a lower casing of a metal alloy casing. In various embodiments, additional features are provided for helping to make sure the seal assembly stays together, such as spot welds formed through the seal assembly, an S-shaped casing, and a recess/protrusion feature provided on adjacent layers of metal matrix material.

Abstract: A one-way valve is provided. The one-way valve may be, for example, a check valve, a relief valve, or the like, which may be in the form of a poppet valve. The valve provides a housing with a through hole. The through hole has an upstream portion and a downstream portion. The upstream portion has a reduced diameter compared to the downstream portion. The housing contains a valve seat, which typically has a taper. A poppet, or valve member, moves within the through hole from a valve closed position and a valve open position. The poppet has a high pressure facing side and a low pressure facing side opposite the high pressure facing side. The low pressure facing side of the poppet engages an elastic member of a compression member that biases the poppet in the valve closed position. The high pressure facing side of the poppet engages a resilient metal seal in the form of an annular disc. The annular disc has a generally wavy or undulating shape.

Abstract: Several embodiments of the present technology are directed to actively controlling a temperature of a substrate in a chamber during manufacturing of a material or thin film. In some embodiments, the method can include cooling or heating the substrate to have a temperature within a target range, depositing a material over a surface of the substrate, and controlling the temperature of the substrate while the material is being deposited. In some embodiments, controlling the temperature of the substrate can include removing thermal energy from the substrate by directing a fluid over the substrate to maintain the temperature of the substrate within a target range throughout the deposition process.

Abstract: An abradable composite material comprising a matrix of sintered metallic particles and non-metallic solid lubricants disposed within the interstitial spaces of the matrix is described. The abradable composite material is capable of being used with, e.g., titanium-alloy blades of a gas turbine at least in part because the abradable composite material does not cause excessive wear or damage to the blades of the gas turbine. Methods of forming the abradable composite material are also described.

Abstract: Flexible seal assemblies having a relatively low torsional rigidity and high longitudinal flexure to thereby allow the flexible seal assembly to flex between adjacent components and maintain a seal, even when movement between adjacent components occurs, is described. In some embodiments, the flexible seal assembly includes one or more layers of metal matrix material, the metal matrix material being comprised of a plurality of short segments of thin wire arranged randomly and sintered together to form a semi-rigid sheet. The one or more layers of metal matrix material can be sandwiched between an upper casing and a lower casing of a metal alloy casing. In various embodiments, additional features are provided for helping to make sure the seal assembly stays together, such as spot welds formed through the seal assembly, an S-shaped casing, and a recess/protrusion feature provided on adjacent layers of metal matrix material.

Abstract: Several embodiments of the present technology are directed to bonding sheets having enhanced plasma resistant characteristics, and being used to bond to semiconductor devices. In some embodiments, a bonding sheet in accordance with the present technology comprises a base bond material having one or more thermal conductivity elements embedded therein, and one or more etched openings formed around particular regions or corresponding features of the adjacent semiconductor components. The bond material can include PDMS, FFKM, or a silicon-based polymer, and the etch resistant components can include PEEK, or PEEK-coated components.

Abstract: An annular seal comprising a metallic ring having a cross section. The cross section includes an axially extending body portion having a radial width and an axial height. A spaced apart pair of sealing arms extend axially from the body portion, wherein each sealing arm includes a radially opposed arcuate sealing surface. The arcuate sealing surface may be convex, for example. The spaced apart pair of sealing arms are spaced apart a radial distance greater than the radial width of the body portion. A sealing system comprises a plurality of interconnected metallic rings wherein the body portion engages the sealing arms of an adjacent metallic ring.

Abstract: The technology of the present application provides an apparatus for sealing and filtering. The apparatus includes a sealing component and a filtering component. The sealing component has an annular structure and a first connecting component. The annular structure includes a sidewall defining a recess. The first connecting component extends from the annular structure in a first direction. The filtering component has a filtering material and a second connecting component. The filtering material has a flat structure. The filter material is configured to filter fluid passing therein in a second direction. The sealing component and the filtering component are coupled by the first connecting component and the second connecting component.

Abstract: The technology of the present application provides a floating ball valve. The ball valve includes a valve body having a recess or chamber and a ball contained in the recess. A valve seat forms a sealing relationship between the ball and the fluid conduit. The valve seat has a resilient seat or member formed on the valve seat that confronts a surface of the ball. An energized spring seal on the opposite side forms a seal between the valve body and the valve seat and pushes the resilient seat towards the ball.

Abstract: A high pressure separator/accumulator that uses dual bellows is provided. The dual bellows are not mechanically linked but rather operationally coupled through a fluid medium. The high pressure separators includes a housing defining a first internal space. The housing is in fluid communication with a first fluid system and a second fluid system. A first bellows is coupled to the interior of the separator and defines a space with a variable volume. The space is in fluid communication with the first fluid system. A second bellows is coupled to the interior of the separator, generally opposed to the first bellows, and defines a space with a variable volume. The space is in fluid communication with the second fluid system. The two fluid systems, however, are isolated from each other by the separator. The housing is charged with a fluid medium that transmits force between the first and second bellows.

Abstract: An annular seal comprising a metallic ring having a cross section. The cross section includes an axially extending body portion having a radial width and an axial height. A spaced apart pair of sealing arms extend axially from the body portion, wherein each sealing arm includes a radially opposed arcuate sealing surface. The arcuate sealing surface may be convex, for example. The spaced apart pair of sealing arms are spaced apart a radial distance greater than the radial width of the body portion. A sealing system comprises a plurality of interconnected metallic rings wherein the body portion engages the sealing arms of an adjacent metallic ring.

Abstract: A sealed dual coaxial rotary shaft feedthrough device is provide. The device includes an inner shaft and a hollow outer shaft that is coaxial to encompass the inner shaft. The shafts include coupled drive and driven shafts. The coupling, which may be referred to as an eccentric coupling, causes the driven shaft to rotate with the drive shaft. The rotation is transmitted without breaking the seal by an eccentric portion of either the drive or driven shaft being nutatingly coupled to either a transition cap or transition cup. Nutatingly coupled means rotation of the shaft causes the transition cap or cup to orbit, but not spin, about the longitudinal axis. The nutation is transmitted by the transition cap or cup to the other of the shafts, which rotates.

Abstract: A resilient metal seal that includes a PTFE jacket or liner capable of improving the sealing performance of the resilient metal seal and providing a near chemically inert surface to protect the seal from coming into contact with potentially damaging media is provided. In some embodiments, the resilient metal seal is an E-, U-, C-, or V-shaped resilient metal seal. A jacket made of PTFE or similar material can be included on the interior or exterior surface of the resilient metal seal. The jacket can include a locking feature to prevent against the jacket becoming dislodged from the resilient metal seal.

Abstract: A sealed dual coaxial rotary shaft feedthrough device is provide. The device includes an inner shaft and a hollow outer shaft that is coaxial to encompass the inner shaft. The shafts include coupled drive and driven shafts. The coupling, which may be referred to as an eccentric coupling, causes the driven shaft to rotate with the drive shaft. The rotation is transmitted without breaking the seal by an eccentric portion of either the drive or driven shaft being nutatingly coupled to either a transition cap or transition cup. Nutatingly coupled means rotation of the shaft causes the transition cap or cup to orbit, but not spin, about the longitudinal axis. The nutation is transmitted by the transition cap or cup to the other of the shafts, which rotates.