Patents Assigned to Technics GmbH Europa
  • Etching device
    Patent number: 4559099
    Abstract: An etching device is disclosed which comprises a high frequency generator and a reactor in close proximity to each other. The reactor has a plasma zone and a processing zone which open directly into each other. The device is advantageous for chemical dry etching in that a short distance between plasma zone and processing zone offers the benefit of small radical loss.
    Type: Grant
    Filed: August 24, 1984
    Date of Patent: December 17, 1985
    Assignee: Technics GmbH Europa
    Inventors: Gerhard Liebel, Bert Kegel
  • Ion beam gun
    Patent number: 4521719
    Abstract: The invention relates to an ion beam gun having a pair of electrodes for applying a high-frequency high voltage to ionize an ionization gas, the ions produced being extracted by an extraction electrode arranged behind the pair of electrodes in the direction of the ion beam (FIG. 1).
    Type: Grant
    Filed: August 27, 1982
    Date of Patent: June 4, 1985
    Assignee: Technics GmbH Europa
    Inventor: Gerhard Liebel