Abstract: An extrusion is coated with a resin by passing the extrusion continuously through a belt-shaped plasma formed by means of a stationary annular electron cyclotron resonance magnet which completely surrounds the extrusion. The resin coating is produced by plasma polymerization of a monomer using microwaves having a frequency of 2.45 GHz.
Type:
Grant
Filed:
December 19, 1989
Date of Patent:
January 7, 1992
Assignees:
Technics Plasma GmbH, Krauss Maffei AG
Inventors:
Stefan Schulz, Berthold H. Kegel, Wolfgang Mohl
Abstract: The invention relates to a filamentless magnetron-ion source with a magnetron, a microwave guide or a microwave coaxial line, a cylindrical cavity resonator, a lambda-4-short circuit slider member, ECR magnets and a quartz dome. The invention also relates to a process using the said apparatus.