Patents Assigned to Techniks, Inc.
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Patent number: 11111600Abstract: A process chamber which may be operated as follows: mounting substrates in a substrate carrier; loading the substrate carrier into a vacuum chamber and mating the substrate carrier with an upper gas manifold and a lower gas manifold; providing and maintaining a vacuum environment within the vacuum chamber; making electrical contact to an at least one electrically-resistive heater; heating the substrates to a process temperature by flowing current through the at least one electrically-resistive heater; and while heating the substrates, flowing process gas through odd numbered channels from the upper gas manifold to the lower gas manifold, and simultaneously flowing process gas through even numbered channels from the lower gas manifold to the upper gas manifold; wherein the process gas comprises an inert gas and the substrates are being thermally annealed, or wherein the process gas is a dopant gas and the substrates are being doped.Type: GrantFiled: December 4, 2017Date of Patent: September 7, 2021Assignee: Svagos Technik, Inc.Inventors: Tirunelveli S. Ravi, Visweswaren Sivaramakrishnan
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Patent number: 11041253Abstract: A system for depositing thin single crystal silicon wafers by epitaxial deposition in a silicon precursor depletion mode with cross-flow deposition may include: a substrate carrier with low total heat capacity, high emissivity and small volume; a lamp module with rapid heat-up, efficient heat production, and spatial control over heating; and a manifold designed for cross-flow processing. Furthermore, the substrate carrier may include heat reflectors to control heat loss from the edges of the carrier and/or heat chokes to thermally isolate the carrier from the manifolds, allowing independent temperature control of the manifolds. The carrier and substrates may be configured for deposition on both sides of the substrates—the substrates having release layers on both sides and the carriers being configured to have equal process gas flow over both surfaces of the substrate. High volume may be addressed by a deposition system comprising multiple mini-batch reactors.Type: GrantFiled: May 29, 2018Date of Patent: June 22, 2021Assignee: Svagos Technik, Inc.Inventors: Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Andrzej Kaszuba, Quoc Vinh Truong, Jean R. Vatus
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Patent number: 10961621Abstract: A CVD reactor for single sided deposition of material on substrates, may comprise: an upper gas manifold and a lower gas manifold; a substrate carrier comprising a gas tight rectangular box open on upper and lower surfaces, a multiplicity of planar walls across the width of the box, the walls being equally spaced in a row facing each other and defining a row of channels within the box, the walls comprising mounting fixtures for a plurality of substrates and at least one electrically resistive heater element; and clamps within the vacuum chamber for making electrical contact to the at least one electrically resistive heater element; wherein the upper gas manifold and the lower gas manifold are configured to attach to the upper and lower surfaces of the substrate carrier, respectively, connect with upper and lower ends of the channels, and isolate gas flows in odd numbered channels from gas flows in even numbered channels, wherein the channels are numbered in order along the row, and wherein the gas flows comprType: GrantFiled: June 6, 2016Date of Patent: March 30, 2021Assignee: Svagos Technik, Inc.Inventors: Visweswaren Sivaramakrishnan, Tirunelveli S. Ravi, Timothy N. Kleiner, Quoc Truong
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Patent number: 10947640Abstract: A CVD reactor for deposition of silicon carbide material on silicon carbide substrates, may comprise: an upper gas manifold and a lower gas manifold; and a substrate carrier comprising a gas tight rectangular box open on upper and lower surfaces, a multiplicity of planar walls across the width of the box, the walls being equally spaced in a row facing each other and defining a row of channels within the box, the walls comprising mounting fixtures for a plurality of substrates and at least one electrically resistive heater element; wherein the upper gas manifold and the lower gas manifold are configured to attach to the upper and lower surfaces of the substrate carrier, respectively, connect with upper and lower ends of the channels, and isolate gas flows in odd numbered channels from gas flows in even numbered channels, wherein the channels are numbered in order along the row; and wherein said electrically resistive heater elements and said mounting fixtures are coated with a material able to withstand exposuType: GrantFiled: December 4, 2017Date of Patent: March 16, 2021Assignee: Svagos Technik, Inc.Inventors: Tirunelveli S. Ravi, Visweswaren Sivaramakrishnan
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Patent number: 10847421Abstract: Methods and equipment for the removal of semiconductor wafers grown on the top surface of a single crystal silicon substrate covered by a porous silicon separation layer by using IR irradiation of the porous silicon separation layer to initiate release of the semiconductor wafer from the substrate, particularly at edges (and corners) of the top surface of the substrate.Type: GrantFiled: June 22, 2017Date of Patent: November 24, 2020Assignee: Svagos Technik, Inc.Inventors: Tirunelveli S. Ravi, Stephen Daniel Miller
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Publication number: 20130230361Abstract: A machine tool assembly has a tool holder, a cutting tool, a collet, and a collet nut. The tool holder defines a keyed recess having multiple corners and/or multiple flats formed around an inner surface of the keyed recess. The keyed recess can be integral with the tool holder or can be a separate positioning chuck rotationally and axially secured within the tool holder. The cutting tool is inserted into the collet and has multiple edges and/or multiple flats formed on a keyed end of shank that are matingly received by the keyed recess to prevent relative rotation between the tool holder and the cutting tool and make the cutting tool rotationally and axial fixed within the tool holder. The keyed recess includes a spacer preventing the keyed end of the cutting tool from contacting a base of the keyed recess, thereby preventing radial misalignment of the cutting with the axis of the tool holder from the axial translation and force applied during tightening of the collet nut and collet.Type: ApplicationFiled: March 4, 2013Publication date: September 5, 2013Applicant: Techniks, Inc.Inventors: John A. Stagge, Michael S. Eneix
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Patent number: 7823751Abstract: A method and apparatus for extruding the first fluid capable of foaming through a porous member to produce a first foamed extrudate while simultaneously dispensing a second flowable material preferably containing particulate matter adjacent the first extrudate.Type: GrantFiled: December 23, 2009Date of Patent: November 2, 2010Assignee: Hygiene-Technik Inc.Inventors: Heiner Ophardt, Ali Mirbach
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Patent number: 7661561Abstract: A method and apparatus for extruding the first fluid capable of foaming through a porous member to produce a first foamed extrudate while simultaneously dispensing a second flowable material preferably containing particulate matter adjacent the first extrudate.Type: GrantFiled: March 10, 2005Date of Patent: February 16, 2010Assignee: Hygiene-Technik Inc.Inventors: Heiner Ophardt, Ali Mirbach
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Patent number: 7556178Abstract: Liquid dispensers are provided including a vacuum relief mechanism with a vacuum relief device and a one-way valve in series with the vacuum relief device to prevent flow into and out of the reservoir when a vacuum exists in the reservoir. The vacuum relief device comprises an enclosed chamber having an air inlet open to the atmosphere and a liquid inlet in communication with liquid in the reservoir and in which the liquid inlet opens to the chamber at a height below a height at which the air inlet opens to the chamber. The one-way valve is capable of failure, in which case the vacuum relief device alone provides for pressure relief. The vacuum relief valve permits relief of vacuum from the reservoir without moving parts or valves.Type: GrantFiled: March 22, 2005Date of Patent: July 7, 2009Assignee: Hygiene-Technik Inc.Inventor: Heiner Ophardt
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Patent number: 7451894Abstract: A fingerprint reader for a thumb disposed above an outlet for fluid and adapted to be engaged by an inside surface of a user's thumb extending upwardly relative to the palm of a user's hand while the user's hand extends generally horizontally forwardly from the thumb directed upwardly to receive fluid dispensed downwardly thereon to from a fluid dispensing outlet while the thumb engages the fingerprint reader.Type: GrantFiled: March 22, 2005Date of Patent: November 18, 2008Assignee: Hygiene-Technik Inc.Inventor: Heiner Ophardt
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Patent number: 7367477Abstract: A dispenser with an activation lever which extends laterally to one side of the dispenser and is particularly adapted for engagement by an elbow of one arm of a user and particularly adapted for dispensing fluid as onto the hand of a second arm of the user thereby avoiding the need for the activation lever to be engaged by a hand of a user.Type: GrantFiled: March 31, 2005Date of Patent: May 6, 2008Assignee: Hygiene-Technik Inc.Inventors: Heiner Ophardt, Henry Bruckner
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Patent number: 7364053Abstract: A soap dispenser, preferably a sink side counter mounted dispenser, to dispense foamed liquid soap by mixing in an outlet of a soap spout liquid, soap and air preferably provided from a liquid soap pump and a air pump located remote from the faucet.Type: GrantFiled: August 30, 2004Date of Patent: April 29, 2008Assignee: Hygiene-Technik Inc.Inventor: Heiner Ophardt
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Patent number: 7306121Abstract: A plastic squeeze container for dispensing a fluid carrying a turret member rotatably mounted to the container for movement to a plurality of different rotational positions with the turret member carrying an outlet through which fluid may be dispensed generally along an outlet axis and with rotation of the turret member the outlet axis varying as to the angles it assumes relative to a vertical axis of the container.Type: GrantFiled: March 21, 2005Date of Patent: December 11, 2007Assignee: Hygiene-Technik Inc.Inventors: Heiner Ophardt, Abdul Vali Syed
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Patent number: 7267251Abstract: A piston pump dispenser having a reciprocating piston pump arrangement which, in a dispensing stroke, dispenses fluid from an outlet and, in a charging stroke, to draw fluid from a reservoir also draws back fluid from the outlet through which fluid is dispensed in the dispensing stroke.Type: GrantFiled: September 13, 2004Date of Patent: September 11, 2007Assignee: Hygiene-Technik Inc.Inventor: Heiner Ophardt
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Patent number: 7234612Abstract: A delay mechanism including one or more suction cups which during a normal cycle of dispensing from a liquid dispenser come to engage on a surface and thereby delay the return of an actuating member in the dispenser to a position for further dispensing until such time as the suction cup disengages from the surface.Type: GrantFiled: May 11, 2005Date of Patent: June 26, 2007Assignee: Hygiene-Technik Inc.Inventor: Heiner Ophardt
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Patent number: 7232045Abstract: An object of the invention is to provide a dispenser which permits its cover to be either locked when closed or unlocked a dispensing device including a lock mechanism for locking a cover to a housing and providing therewith a blocking member which is either coupled to the housing in an inoperative position or can be coupled to the housing in a position which prevents locking of the lock mechanism. The blocking member may preferably be integrally formed from plastic as the same material as another component of the dispenser, preferably from injection molded integrally with a back plate for the housing, at a location which is not visible when the dispenser is used and with the blocking member being removably connected to the housing back plate by a frangible connection which may readily be broken to separate the blocking member from the housing back plate such that the blocking member may be suitably positioned and coupled to the dispenser in a position which prevents locking of the lock mechanism.Type: GrantFiled: March 22, 2005Date of Patent: June 19, 2007Assignee: Hygiene-Technik Inc.Inventors: Heiner Ophardt, Srdjana Jankovic
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Patent number: 7225948Abstract: A replaceable fluid container carrying a spray pump with a nozzle which directs spray directionally in which an arrangement is provided for orientating the nozzle into a desired orientation on insertion of the container into a dispenser.Type: GrantFiled: March 29, 2004Date of Patent: June 5, 2007Assignee: Hygiene-Technik Inc.Inventors: Heiner Ophardt, Srdjana Jankovic
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Patent number: 7178692Abstract: A method of and apparatus for dispensing paste from a collapsible container elongate about an axis from a first closed end to a second open end, the method comprising rotating one of the first end and second end relative to the other to twist the container about the axis, thereby collapsing the container, compressing paste contained therein and extruding the paste from the second open end.Type: GrantFiled: March 24, 2004Date of Patent: February 20, 2007Assignee: Hygiene-Technik Inc.Inventor: Heiner Ophardt
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Patent number: 6957751Abstract: Liquid soap dispensers including a vacuum relief valve which comprises an enclosed chamber having an air inlet open to the atmosphere and a liquid inlet in communication with liquid in the reservoir and in which the liquid inlet opens to the chamber at a height below a height at which the air inlet opens to the chamber. The vacuum relief value permits relief of vacuum from the reservoir without moving parts or values.Type: GrantFiled: April 26, 2002Date of Patent: October 25, 2005Assignee: Hygiene-Technik Inc.Inventor: Heiner Ophardt
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Patent number: RE40319Abstract: A pump assembly provides for direct replacement of volumes of liquid from a reservoir with equal volumes of air preferably at substantially atmospheric pressure, the same pressure or with pressure equalization to be at least equal to atmospheric pressure. A slide arrangement preferably positively displaces liquid from the reservoir and air into the reservoir. The pump draws air from the atmosphere into a chamber from which the air either is available for passage to replace liquid from the reservoir or is pressurized to assist dispensing liquid, preferably, admixing with the liquid to provide foaming. Gravity separation of air and liquid to be dispensed is used to replace liquid with air in the reservoir and to selectively place air and liquid into communication with passageways for ejection.Type: GrantFiled: August 5, 2005Date of Patent: May 20, 2008Assignee: Hygiene-Technik Inc.Inventors: Heiner Ophardt, Ali Mirbach