Patents Assigned to TECHNISCHE UNIVERSITAT LLMENAU
  • SILICON-CERAMIC COMPOSITE SUBSTRATE
    Publication number: 20100254099
    Abstract: The invention relates to a silicon-ceramic composite substrate (01), which comprises a low-temperature ceramic (02) having at least one pre-structured ceramic layer and a silicon substrate (03). According to the invention, the low-temperature ceramic (02) forms a carrier layer and the silicon substrate surface has nanostructures (06), which are completely penetrated into the low-temperature ceramic (02), in a contact area (04) with the carrier layer.
    Type: Application
    Filed: December 4, 2008
    Publication date: October 7, 2010
    Applicant: TECHNISCHE UNIVERSITAT LLMENAU
    Inventors: Michael FISCHER, Heike BARTSCH DE TORRES, Martin HOFFMANN, Jens MULLER, Beate PAWLOWSKI, Stefan BARTH