Abstract: A mixed gas supply device includes: an evaporator that heats a liquid component and the carrier gas to generate the mixed gas; and a cooler that cools the mixed gas. The evaporator includes a shell-and-tube-type heating mechanism. In a shell of the evaporator, a carrier gas tube that has holes for bubbling of the carrier gas opened at multiple locations extends in the horizontal direction. A liquid component supply port is at a lower portion of the shell of the evaporator. A discharge port that discharges the mixed gas that is composed of the carrier gas and the component gas obtained by vaporizing the liquid component is at an upper portion of the shell of the evaporator. A lower portion of the cooler is connected to the discharge port of the evaporator via a pipe.

Abstract: A continuous distillation-type trichlorosilane vaporization supply apparatus includes an evaporator including an introduction port for hydrogen gas as a carrier gas and having a heater that vaporizes liquid trichlorosilane; and a condenser including a cooling device to condense liquid at a temperature corresponding to a saturated vapor pressure, which is lower than a vapor pressure of the vaporized trichlorosilane gas, wherein a center line of the evaporator and a center line of the condenser are not on the same line, and a lower end of the condenser has a structure that communicates with a lower end of the evaporator through a pipe.

Abstract: A continuous distillation-type trichlorosilane vaporization supply apparatus includes an evaporator including an introduction port for hydrogen gas as a carrier gas and having a heater that vaporizes liquid trichlorosilane; and a condenser including a cooling device to condense liquid at a temperature corresponding to a saturated vapor pressure, which is lower than a vapor pressure of the vaporized trichlorosilane gas, wherein a center line of the evaporator and a center line of the condenser are not on the same line, and a lower end of the condenser has a structure that communicates with a lower end of the evaporator through a pipe.