Abstract: A three dimensional structure comprising at least two materials capable of being deposited by vapor deposition. The structure is fabricated by the controlled vapor deposition of the materials onto a substrate.
Type:
Grant
Filed:
March 21, 2003
Date of Patent:
February 14, 2006
Assignee:
Technology Ventures, LLC
Inventors:
Yuval C. Avniel, Peter Mardilovich, Alexander Govyadinov