Abstract: Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.

Abstract: Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.

Abstract: Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.

Abstract: Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.

Abstract: A piezoelectric rotating motor includes a plurality of piezoelectric elements, a disk-shaped stator having a center portion in which the piezoelectric elements are accommodated, a circular friction zone which is formed on an outer peripheral portion of its one surface and a connecting portion which connects the center portion with the friction zone so as to form a lever transmitting and amplifying the axial strain of the piezoelectric elements to the portion of the friction zone located in the same angular sector as the piezoelectric elements and which has a cone shape at rear side of the friction zone so as to thin its thickness from the center portion to the outer peripheral portion and producing a progressive wave forming an elliptical vibration on the friction zone by the composition of its three dimensional strain due to the piezoelective effect of the piezoelectric elements and a rotor being contracted with the friction zone under pressure.