Patents Assigned to Tel Sagani Limited
  • Heat treatment apparatus
    Patent number: 4976613
    Abstract: Disclosed is a heat treatment apparatus comprises a body having an opening section on the clear room side, a furance disposed in the body, a process tube arranged elevatably relative to the furnace, and a preventing plate arranged closably at the opening section for shutting off the opening section when it is closed, thereby it is possible to prevent dust from entering into the clean room by closing the opening section with the preventing plate.
    Type: Grant
    Filed: September 26, 1988
    Date of Patent: December 11, 1990
    Assignee: Tel Sagani Limited
    Inventor: Shingo Watanabe