Abstract: A coriolis flow sensor is disclosed. The coriolis flow sensors comprises a first substrate layer, a second substrate layer, and a third substrate layer. The first substrate layer comprises a first wall. The second substrate layer comprises a second wall. The third substrate layer is disposed between the first and second substrate layers in a stacked configuration. The third substrate layer defines a flow path. The first and second walls of the respective first and second substrates and the flow path defined by the third substrate layer define a first flow channel configured to receive a fluid therethrough. A first actuator is configured to generate vibrations in the first flow channel. The first flow channel is mechanically moveable.
Type:
Application
Filed:
September 20, 2013
Publication date:
March 26, 2015
Applicant:
Teledyne Instruments, Inc. d/b/a Teledyne Hastings
Inventors:
Tong Chen, William J. Alvesteffer, James M. Camper