Abstract: A highly reliable, simple-structured and low-cost thermal flowmeter is provided. The thermal flowmeter in an embodiment according to the present invention includes a planar heating element located to surround a part of an outer side surface of a flow path; first and second temperature detection elements located on the planar heating element at a prescribed interval; and electrodes located at both of two ends of the planar heating element. The planar heating element contains a carbon material and cellulose fiber.

Abstract: The present invention provides a highly corrosion-resistant diaphragm pressure sensor capable of obviating the effects of temperature drift that arises when a pressure-travel coefficient changes with temperature of a fluid whose pressure is sensed, and a method of manufacturing the same. A fluororesin thin film diaphragm pressure sensor comprises a pressure sensing element (10, 20) having a pressure receiving part with a deposition electrode formed on each of the opposing faces of sapphire or alumina ceramic diaphragms which are arranged in opposing relation, and a welding portion (10A, 20A) on a part of each of the surfaces of the diaphragms; and a fluororesin base (41, 61) for securing the pressure sensing element at the welding portion of the pressure sensing element. The pressure sensing element is coated with a fluororesin thin film having a cross-linked structure, and the pressure sensing element and the fluororesin base are welded together via the fluororesin thin film having a cross-linked structure.

Abstract: There is provided a highly accurate electrical capacitance diaphragm pressure sensor capable of reducing temperature drift that arises when a pressure-travel coefficient changes with temperature variations of a fluid whose pressure is sensed.

Abstract: A compact and highly accurate pressure sensor, and a method of fabricating the same are provided by improving functioning of a diaphragm which acts as a means for sensing a fluid pressure.

Abstract: There is provided an improved load transducer type metal diaphragm pressure sensor capable of accurately sensing pressures, which is low in cost, easy to fabricate, and suitable for mass-production. The metal diaphragm pressure sensor (1) comprises a disc-shaped metal diaphragm (2) having a pressure element to which a fluid pressure is applied; a strip-shaped beam member (4) of silicone spanning the diaphragm in a direction of the diameter of the diaphragm, said beam member (4) having electrically insulating insulation bases (3) at each of its ends and in its midsection, and being bonded to the metal diaphragm at each of its ends via the insulation bases (3a, 3b); a pin-shaped pivot (5) connected between the midsection of the beam member and the midsection of the metal diaphragm via the insulation base (3c); and a bridge circuit containing diffused resistor elements (6a, 6a′).