Abstract: A physical vapor deposition coating system to produce orthogonal lift-off coatings. The system incorporates multiple domes that rotate about the source centerline and about another axis of rotation in order to assure an even coating and to utilize a large percentage of a material evaporated from the source.
Type:
Application
Filed:
March 19, 2002
Publication date:
September 25, 2003
Applicant:
TEMESCAL, A UNIT OF THE BOC GROUP, INC.
Inventors:
Ping Chang, Gregg Wallace, Russell J. Hill, Cris Kroneberger, P.A. Joel Smith