Abstract: Disclosed is a probe card including: first probes disposed above a first region and configured to contact with test electrodes in the first region to transfer electrical signals thereto; second probes disposed above a second region and configured to contact with test electrodes on a component mounted in the second region to transfer the electrical signals thereto; a first guide plate disposed to face a semiconductor wafer and formed with first probe holes into which one ends of the first and second probes are inserted; a second guide plate disposed on an upper portion of the first guide plate and formed with second probe holes into which the other ends of the first probes are inserted; and a third guide plate disposed on an upper portion of the first guide plate and formed with third probe holes into which the other ends of the second probes are inserted.

Abstract: Disclosed is a probe card including: a plurality of probes configured to come into contact with a test body and transfer electrical signals thereto; a probe printed circuit board (PCB) on which signal wirings are formed to distribute the electrical signals and transfer the distributed electrical signals to the plurality of probes; a first guide plate disposed to face the test body and formed with a plurality of probe holes into which one ends of the plurality of probes are inserted; and a second guide plate disposed in parallel with the first guide plate and formed with a plurality of probe holes into which the other ends of the plurality of probes are inserted. The signal wirings on the probe PCB and the other ends of the plurality of probes are directly and electrically connected to each other through coaxial cables.

Abstract: Disclosed is a needle probe card including: a first plate having a plurality of needle holes into which straight needles are inserted and installed to face a test object; a second plate having a plurality of needle holes into which the straight needles are inserted and installed above the first plate so as to be relatively movable in a first direction with respect to the first plate; a needle drop prevention plate having a plurality of needle holes into which the straight needles are inserted and installed between the first plate and the second plate so as to be relatively movable in the first direction with respect to each of the first plate and the second plate; and a displacement amount adjustment means configured to adjust a relative displacement amount among the first plate, the second plate, and the needle drop prevention plate in the first direction.