Patents Assigned to TERA PROBER, INC.
  • PROBER AND SEMICONDUCTOR WAFER TESTING METHOD USING THE SAME
    Publication number: 20100013509
    Abstract: A prober for a semiconductor wafer test includes a stage, a probe card, and an adjuster The stage has a first region and a second region other than the first region The first region is covered by a wafer on which a plurality of electrode pads is provided. The probe card includes a plurality of probe pins to be in contact with the plurality of electrode pads. The adjuster is included in the stage and adjusts a temperature of the wafer and the second region.
    Type: Application
    Filed: July 14, 2009
    Publication date: January 21, 2010
    Applicants: ELPIDA MEMORY, INC., TERA PROBER, INC.
    Inventors: Shota SETOGUCHI, Yosuke KAWAMATA