Patents Assigned to Terabase Inc.
  • ELECTRON GUN CHAMBER FOR SCANNING ELECTRON MICROSCOPE, ELECTRON GUN CONTAINING SAME, AND SCANNING ELECTRON MICROSCOPE
    Publication number: 20240212971
    Abstract: Provided is an electron gun chamber for a scanning electron microscope with (a) an electron source chamber; (b) an intermediate room; (c) an air lock valve installation part; (d) exhaust holes for a preliminary vacuum exhaust pump; and (e) an opening and closing means.
    Type: Application
    Filed: March 18, 2021
    Publication date: June 27, 2024
    Applicants: NATIONAL INSTITUTE FOR MATERIALS SCIENCE, Terabase Inc.
    Inventors: Han ZHANG, Yasushi YAMAUCHI, Yoshihiro ARAI