Abstract: A gas burner, which is particularly suitable for flame treatment of substrates having large surfaces, e.g. for coating such surfaces in a combustion chemical vapor deposition (CCVD) process, includes a burner body with a gas supply connection and a nozzle plate, wherein the burner body and the nozzle plate constitute together a gas plenum and the nozzle plate constitutes a perforated wall section of the plenum. The nozzle plate includes a large number of nozzles extending from a plenum side to a flame side of the nozzle plate and it is made of a plurality of sheets which are arranged in a stack and extend substantially perpendicular or substantially parallel to the nozzle extension. The sheets include through openings, wherein the through openings of all sheets are at least partly aligned with each other, or they have a comb-like form.

Abstract: An electron beam device has a body provided with an exit window, said body is forming or is at least partly forming a vacuum chamber, the vacuum chamber comprising therein a cathode housing and at least one electron generating filament. At least one getter sheet is provided between the cathode housing and the filament. The invention is further comprising a getter sheet for use in an electron beam device and a method of manufacturing an electron beam device comprising at least one getter sheet.

Abstract: A device for carrying out a plasma enhanced process includes, within a vacuum chamber, at least one magnetron electrode (32) constituting an unbalanced magnetron having a flat magnetron face (20) with peripheral and central magnetic poles of opposite polarities connected to a source (34) of alternating voltage. The device further includes a device for positioning a substrate (25), the substrate having a surface to be treated facing the magnetron face (20), and a gas supply device for supplying a process gas or process gas mixture to the space between the magnetron face (20) and the treated surface.

Abstract: The invention relates to a sonotrode (1) for ultrasonic machining workpieces. The sonotrode (1) is connected on the input side to a drive (5) with at least two ultrasonic transmitter units excited by an ultrasonic generator, is provided with a narrow and long machining surface (12) in front on the output side of the sonotrode, and is provided, at the side, with at least slot (10) situated approximately between two ultrasonic transmitter units. In order to obtain a narrow and long machining surface (12) in front on the output side of the sonotrode (1), whereby the machining surface has a length of more than twice the effective machining length so that it extends away over the crosswise dimension even of a wider workpiece, and the height of the device, which is measured from the front machining surface to behind over the drive (5), is not significantly greater than ?/2.