Abstract: The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process.
Type:
Grant
Filed:
December 2, 2013
Date of Patent:
July 12, 2016
Assignees:
The Board of Regents of the University of Texas System, Texas Micropower Inc.
Inventors:
Erika Fuentes-Fernandez, Pradeep Shah, Wardia Mechtaly-Debray, Bruce E. Gnade
Abstract: The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process.
Type:
Application
Filed:
December 2, 2013
Publication date:
March 27, 2014
Applicants:
Texas Micropower, Inc., The Board of Regents of the University of Texas System
Inventors:
Erika Fuentes-Fernandez, Pradeep Shah, Wardia Mechtaly-Debray, Bruce E. Gnade
Abstract: The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process.
Type:
Grant
Filed:
November 17, 2012
Date of Patent:
January 21, 2014
Assignees:
The Board of Regents of the University of Texas System, Texas Micropower, Inc.
Inventors:
Erika Fuentes-Fernandez, Pradeep Shah, Wardia Mechtaly-Debray, Bruce E. Gnade
Abstract: The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process.
Type:
Application
Filed:
November 17, 2012
Publication date:
June 6, 2013
Applicants:
Texas Micropower, Inc., The Board of Regents of the University of Texas System
Inventors:
The Board of Regents of the University of Texas S, Texas Micropower, Inc.