Patents Assigned to The 13th Research Institute Of China Electronics Technology
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Patent number: 12285819Abstract: The invention discloses a method for cutting a substrate wafer from an indium phosphide crystal, and belongs to the field of semiconductor substrate preparation, comprises the following steps of: 1) orientating, cutting the head and the tail of a crystal bar, adjusting the orientation and trying to cut the crystal bar until a wafer with a required crystal orientation cut, wherein the cutting end face is an orientation end face; 2) multi-wire cutting, on a multi-wire cutting apparatus, dividing a crystal bar parallel to an orientation end face into wafers; 3) cleaning, cleaning the wafer until no residue and no dirt existing on the surface; 4) circle cutting, performing circle cutting on the wafer to cut the desired crystal orientation area.Type: GrantFiled: September 10, 2020Date of Patent: April 29, 2025Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATIONInventors: Yanlei Shi, Niefeng Sun, Shujie Wang, Hongfei Zhao, Yaqi Li, Lijie Fu, Yang Wang, Xiaolan Li, Huimin Shao, Huisheng Liu, Jian Jiang
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Patent number: 12289817Abstract: A microwave heating cavity includes a metal shell, a heating sleeve, a dielectric medium, an antenna bracket, a ceramic rod and a metal wire. The metal shell is provided with a middle cavity extending through the metal shell and including a first mounting cavity, a concave air cavity and a second mounting cavity. The heating sleeve is mounted in the first mounting cavity. An accommodating cavity is arranged in the heating sleeve, in which the dielectric medium is arranged. The antenna bracket is mounted in the second mounting cavity. The ceramic rod is mounted on the antenna bracket. The ceramic rod extends into the accommodating cavity and is in contact with the dielectric medium. The metal wire is spirally wound around the ceramic rod and is configured to be connected with an external power.Type: GrantFiled: January 8, 2025Date of Patent: April 29, 2025Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Chunliang Xu, Hongtao Wei, Xiaoliang Li, Tong Li, Junkui Song, Fei Zhang, Daomin Cai
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Patent number: 12268035Abstract: A ultraviolet detector includes a substrate; a first epitaxial layer that is a heavily doped epitaxial layer and located on the substrate, a second epitaxial layer located on the first epitaxial layer, where the second epitaxial layer is a lightly doped epitaxial layer, or a double-layer or multi-layer structure composed of at least one lightly doped epitaxial layer and at least one heavily doped epitaxial layer; an ohmic contact layer located on the second epitaxial layer or formed in the second epitaxial layer, where the ohmic contact layer is a graphical heavily doped layer; and a first metal electrode layer located on the ohmic contact layer.Type: GrantFiled: March 2, 2022Date of Patent: April 1, 2025Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Xingye Zhou, Xin Tan, Yuanjie Lv, Yuangang Wang, Xubo Song, Shixiong Liang, Zhihong Feng
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Patent number: 12188145Abstract: The invention discloses a device and a method for continuous VGF crystal growth through reverse injection synthesis, relating to a device for preparing a semiconductor crystal and growing a single crystal, in particular to a method and a device for continuously growing the crystal in situ by using a VGF method and reverse injection synthesis. The device includes a furnace body, a crucible, a heat preservation system, a heating system, a temperature control system and a gas pressure regulation system, wherein the crucible is arranged in the furnace body, has a synthesis unit at its upper part, and has a crystal growth unit and a seed crystal unit at its lower part, and the synthesis unit is communicated with the crystal growth unit through capillary pores.Type: GrantFiled: December 21, 2018Date of Patent: January 7, 2025Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATIONInventors: Shujie Wang, Niefeng Sun, Tongnian Sun, Huisheng Liu, Yanlei Shi, Huimin Shao, Lijie Fu, Jian Jiang, Xiaodan Zhang, Xiaolan Li, Yang Wang
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Patent number: 12116690Abstract: The present invention relates to a process for synthesizing indium phosphide by liquid phosphorus injection method, which belongs to the field of semiconductor technology. The method comprises: converting gaseous phosphorus into liquid phosphorus through a condenser, injecting the liquid phosphorus into an indium melt while preventing phosphorus vaporization by randomly delivering a low temperature inert gas, and causing an instantaneous reaction between the liquid phosphorus and the liquid indium melt, so that an indium phosphide melt can be synthesized at a relatively low temperature, with advantages of high efficiency, high purity, precise proportioning, large capacity, aiding in the growth of a phosphorus-rich indium phosphide polycrystal and facilitating the growth of an indium phosphide monocrystal. The method includes the steps of indium cleaning, phosphorus charging, furnace loading, communication of condenser, synthesis, preparation of crystals, etc.Type: GrantFiled: September 10, 2020Date of Patent: October 15, 2024Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATIONInventors: Lijie Fu, Niefeng Sun, Shujie Wang, Xiaolan Li, Xin Zhang, Xiaodan Zhang, Yanlei Shi, Huimin Shao, Yang Wang
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Patent number: 12112944Abstract: The disclosure provides a preparation method of GaN field effect transistor based on diamond substrate, and relates to the technical field of semiconductor manufacturing. The method includes the following steps: preparing a GaN heterojunction layer on the front-side of a SiC substrate; thinning the SiC substrate; etching the SiC substrate; growing a diamond layer; removing a sacrificial layer and the diamond layer on the sacrificial layer; preparing a source electrode, a drain electrode and a gate electrode on the front surface of the GaN heterojunction layer; etching the SiC substrate and the GaN heterojunction layer to form a source through hole communicated with the source electrode; and removing the through hole mask layer, and preparing back grounding metal to complete the preparation of the diamond substrate GaN transistor device.Type: GrantFiled: April 25, 2022Date of Patent: October 8, 2024Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Yuangang Wang, Shaobo Dun, Yuanjie Lv, Xingchang Fu, Shixiong Liang, Xubo Song, Hongyu Guo, Zhihong Feng
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Patent number: 12098478Abstract: Disclosed is an apparatus for preparing a large-size single crystal, which relates to the field of semiconductor material preparation, and more particularly, to an apparatus for preparing a large-size single crystal from a plurality of small-size single crystals by connecting them in solid states. The apparatus includes a hydrocooling furnace, a solid connection chamber hermetically disposed in the hydrocooling furnace, and combined fixtures provided in the solid connection chamber, wherein a plurality of crystal pieces are fixed by the combined fixtures, a top column or a stress block is used for pressing the crystal piece through the combined fixtures, a heating wire surrounding the solid connection chamber is provided in the hydrocooling furnace, a vacuum tube is communicated with the solid connection chamber, and a thermocouple is disposed close to the combined fixtures.Type: GrantFiled: September 25, 2020Date of Patent: September 24, 2024Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATIONInventors: Shujie Wang, Niefeng Sun, Yanlei Shi, Huimin Shao, Xiaolan Li, Yang Wang, Lijie Fu, Senfeng Xu, Jian Jiang, Huisheng Liu, Tongnian Sun
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Patent number: 12025501Abstract: A three-dimensional displacement compensation method is provided. The method includes an obtaining step, a transforming step, a first determining step, a first calculating step and a compensating step. The obtaining step includes obtaining a current image of a measured element captured by a microscopic thermoreflectance thermography device. The transforming step includes two sub-steps. One sub-step uses Fourier transform to calculate a reference image to obtain a first result, and the other sub-step uses Fourier transform to calculate the current image to obtain a second result. The first determining step includes determining a peak point coordinate and a fitting diameter of a point spread function of an optical system of the device. The first calculating step includes calculating a three-dimensional displacement of the position to be compensated relative to the reference position. The compensating step compensates the position to be compensated.Type: GrantFiled: July 7, 2022Date of Patent: July 2, 2024Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Yan Liu, Aihua Wu, Wei Wang, Yuwei Zhai, Hao Li, Chen Ding, Xiaodong Jing, Baicheng Sheng
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Patent number: 11984864Abstract: The disclosure relates to the technical field of semiconductors, and discloses a method for manufacturing a resonator. The method includes: a substrate is pretreated to change a preset reaction rate of a preset region part of the substrate, so that the preset reaction rate of the preset region part is higher than that of a region outside the preset region part; a preset reaction is performed to the substrate to form a sacrificial material part including an upper half part above an upper surface of the substrate and a lower half part below a lower surface of the substrate; a multilayer structure is formed on the sacrificial material part, and includes a lower electrode layer, a piezoelectric layer and an upper electrode layer from bottom to top; and the sacrificial material part is removed.Type: GrantFiled: December 27, 2018Date of Patent: May 14, 2024Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATIONInventors: Liang Li, Xin Lv, Dongsheng Liang
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Patent number: 11971451Abstract: A method includes: constructing an on-wafer calibration piece model set that includes one or more on-wafer calibration piece models, where each of the one or more on-wafer calibration piece models has a corresponding on-wafer calibration piece; selecting an on-wafer calibration piece model from the on-wafer calibration piece model set; measuring the on-wafer calibration piece utilizing an on-wafer S parameter measurement system that is calibrated using a multi-thread TRL calibration method in a Terahertz frequency band, to obtain an S parameter of the on-wafer calibration piece; and calculating a plurality of different parameters that represent crosstalk of calibration pieces in the on-wafer calibration piece model, according to an admittance calculated according to the S parameter and an admittance formula corresponding to the on-wafer calibration piece model.Type: GrantFiled: December 14, 2021Date of Patent: April 30, 2024Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Aihua Wu, Yibang Wang, Faguo Liang, Chen Liu, Ye Huo, Peng Luan, Jing Sun, Yanli Li
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Patent number: 11881769Abstract: A multi-level converter control method is provided that includes: acquiring an inductive current of an LC filter in a driving pulse period; determining a to-be-adjusted first switch tube and a first duty ratio adjustment amount of the to-be-adjusted first switch tube based on a slope of a rising period of the inductive current, and adjusting a duty ratio of the to-be-adjusted first switch tube based on the first duty ratio adjustment amount; and determining a to-be-adjusted second switch tube and a second duty ratio adjustment amount of the to-be-adjusted second switch tube based on a slope of a falling period of the inductive current, and adjusting a duty ratio of the to-be-adjusted second switch tube based on the second duty ratio adjustment amount.Type: GrantFiled: November 15, 2021Date of Patent: January 23, 2024Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Zhanbiao Gu, Zhiliang Zhang, Shipeng Cheng, Xiaoyong Ren, Senfeng Xu, Chao Tan
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Patent number: 11843158Abstract: The present application provides a trisection power divider with isolation and a microwave transmission system, where the divider includes a first hybrid ring coupler with a distribution ratio of 1:2 and a second hybrid ring coupler with a distribution ratio of 1:1; a first port of the first hybrid ring coupler is a signal input port; a second port of the first hybrid ring coupler is connected with a first port of the second hybrid ring coupler; a second port of the second hybrid ring coupler, a third port of the second hybrid ring coupler and a third port of the first hybrid ring coupler are three signal output ports of the divider; and the second port of the first hybrid ring coupler is a port with high power.Type: GrantFiled: May 12, 2023Date of Patent: December 12, 2023Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Zhanbiao Gu, Hongmin Gao, Zhiliang Zhang, Xiaoyong Ren, Qianhong Chen, Shujie Wang, Chao Tan, Senfeng Xu
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Patent number: 11817848Abstract: The disclosure provides a resonator and a filter. The resonator includes: a substrate; and a multilayer structure formed on the substrate. The multilayer structure successively includes a lower electrode layer, a piezoelectric layer and an upper electrode layer from bottom to top. A cavity is formed between the substrate and the multilayer structure, and the cavity includes a lower half cavity below an upper surface of the substrate and an upper half cavity beyond the upper surface of the substrate and protruding toward the multilayer structure. A resonator with novel structure and good performance is formed by providing the cavity with the lower half cavity below the upper surface of the substrate and the upper half cavity above the upper surface of the substrate.Type: GrantFiled: December 27, 2018Date of Patent: November 14, 2023Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATIONInventors: Liang Li, Xin Lv, Dongsheng Liang
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Patent number: 11791232Abstract: A packaging structure includes: a substrate provided with a through-cavity penetrating up and down, and a metal heat sink on a front surface of the substrate; a bonding chip mounting area and a first passive element mounting area on the front surface, and a flip chip mounting area, a second passive element mounting area and a pin lead mounting area are provided on a back surface of the substrate; a first sealing ring located at the periphery of the bonding chip mounting area and the first passive element mounting area; a first cover plate packaged on the first sealing ring; a second sealing ring located at the periphery of the flip chip mounting area and the second passive element mounting area with the pin lead mounting area being located at the periphery of the second sealing ring; and a second cover plate packaged on the second sealing ring.Type: GrantFiled: March 1, 2021Date of Patent: October 17, 2023Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Bo Peng, Ling Gao, Xiaojun Zhang, Yang Liu, Qiang Duan, Dapeng Bi, Congge Lu
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Patent number: 11781240Abstract: The invention discloses a method for preparing an indium phosphide crystal by using an indium-phosphorus mixture, belongs to the technical field of semiconductors, and comprises the steps of preparing an indium-phosphorus mixed ball, charging, maintaining the high furnace pressure and the low temperature of the indium-phosphorus mixed ball, melting a covering agent, feeding, synthesizing and crystal growing, which is synthesized by directly melting the proportioned indium-phosphorus mixed ball. Indium powder and phosphorus powder are uniformly mixed and pressed into spherical indium-phosphorus mixed particles, then the mixture of the indium-phosphorus mixed balls and the boron oxide powder is fed into a melt with a boron oxide covering agent, and crystal growth in situ is performed after synthesis.Type: GrantFiled: September 10, 2020Date of Patent: October 10, 2023Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATIONInventors: Niefeng Sun, Shujie Wang, Yanlei Shi, Huimin Shao, Lijie Fu, Xiaolan Li, Yang Wang, Senfeng Xu, Huisheng Liu, Tongnian Sun
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Patent number: 11757048Abstract: A gallium oxide Schottky barrier diode with negative beveled angle terminal and a production method thereof are provided. The production method includes four steps. In the first step, a photoresist layer with a preset pattern is formed on a gallium oxide epitaxial layer, where the gallium oxide epitaxial layer is formed on an upper surface of a gallium oxide substrate. In the second step, first electrode layer is formed on the gallium oxide epitaxial layer. In the third step, the gallium oxide substrate is rotated and the gallium oxide epitaxial layer is etched. In the fourth step, a second electrode layer is formed on the lower surface of the gallium oxide substrate.Type: GrantFiled: April 26, 2023Date of Patent: September 12, 2023Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Yuangang Wang, Yuanjie Lv, Shaobo Dun, Tingting Han, Hongyu Liu, Zhihong Feng
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Patent number: 11733298Abstract: The present application provides two-port on-wafer calibration piece circuit models and a method for determining parameters. The method includes: measuring a single-port on-wafer calibration piece circuit model corresponding to a first frequency band to obtain a first S parameter; calculating, according to the first S parameter, an intrinsic capacitance value of a two-port on-wafer calibration piece circuit model corresponding to the single-port on-wafer calibration piece circuit model; measuring the two-port on-wafer calibration piece circuit model corresponding to the terahertz frequency band to obtain a second S parameter; and calculating a parasitic capacitance value and a parasitic resistance value of the two-port on-wafer calibration piece circuit model according to the second S parameter and the intrinsic capacitance value.Type: GrantFiled: December 14, 2021Date of Patent: August 22, 2023Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Yibang Wang, Aihua Wu, Faguo Liang, Chen Liu, Ye Huo, Peng Luan, Jing Sun, Yanli Li
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Publication number: 20230049408Abstract: A semiconductor phosphide injection synthesis system and a control method are provided, which belong to the technical field of preparation of semiconductor phosphides. The semiconductor phosphide injection synthesis system includes a furnace body, a shielding carrier box arranged above the furnace body by virtue of a lifting mechanism, a phosphorus source carrier arranged in the shielding carrier box, an injection pipe arranged below the phosphorus source carrier, and a crucible arranged at an inner bottom of the furnace body in a matched manner.Type: ApplicationFiled: July 5, 2021Publication date: February 16, 2023Applicant: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATIONInventors: Niefeng SUN, Shujie WANG, Huisheng LIU, Tongnian SUN
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Patent number: 11456387Abstract: The disclosure provides a normally-off gallium oxide field-effect transistor structure and a preparation method therefor, and relates to the technical field of semiconductor device. The normally-off gallium oxide field-effect transistor structure comprises a substrate layer and an n-type doped gallium oxide channel layer from bottom to top. The n-type doped gallium oxide channel layer is provided with a source, a drain, and a gate. The gate is located between the source and the drain. A no-electron channel region is provided in the n-type doped gallium oxide channel layer located below the gate.Type: GrantFiled: October 1, 2020Date of Patent: September 27, 2022Assignee: THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATIONInventors: Yuanjie Lv, Yuangang Wang, Xingye Zhou, Xin Tan, Xubo Song, Shixiong Liang, Zhihong Feng
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Patent number: 11417779Abstract: The disclosure is applicable for the technical field of semiconductor devices manufacturing, and provides a gallium oxide SBD terminal structure. The gallium oxide SBD terminal structure comprises a cathode metal layer, an N+ high-concentration substrate layer, an N? low-concentration Ga2O3 epitaxial layer and an anode metal layer from bottom to top, wherein the N? low-concentration Ga2O3 epitaxial layer is within a range of certain thickness close to the anode metal layer; and a doping concentration below the anode metal layer is greater than a doping concentration on two sides of the anode metal layer. Namely, only a doping concentration of the part outside the corresponding area of the anode metal layer is changed, so that the breakdown voltage of the gallium oxide SBD terminal structure is improved under the condition of guaranteeing low on resistance.Type: GrantFiled: October 13, 2020Date of Patent: August 16, 2022Assignee: The 13th Research Institute of China Electronics Technology Group CorporationInventors: Yuanjie Lv, Yuangang Wang, Xingye Zhou, Xin Tan, Xubo Song, Xuefeng Zou, Shixiong Liang, Zhihong Feng