Abstract: The present invention provides novel silicon-germanium hydride compounds, methods for their synthesis, methods for their deposition, and semiconductor structures made using the novel compounds.
Type:
Application
Filed:
November 21, 2006
Publication date:
January 21, 2010
Applicant:
The Arizona Board of Regents, a body corparate acting onbehalf of Arizona State University
Inventors:
John Kouvetakis, Cole J. Ritter III, Changwu Hu, Ignatius S.T. Tsong, Andrew Chizmeshya