Patents Assigned to The Board of Trustees of the University of Illinois, University of Illinois
  • Nanolithography molecular beam machine
    Publication number: 20030213922
    Abstract: A method of directly writing on a surface of a substrate with neutral molecules uses a collimated beam of neutral molecules having a first direction of travel, a laser light energy field having a second direction of travel; and intersects the laser light energy field with the collimated beam of neutral molecules at a grazing angle of incidence between the first direction of travel and the second direction of travel to control the formation of features comprising the neutral molecules on the surface of the substrate.
    Type: Application
    Filed: May 14, 2003
    Publication date: November 20, 2003
    Applicants: The Board of Trustees of the University of Illinois, University of Illinois, Steacie Institute for Molecular Science, National Research Council of Canada
    Inventors: Robert J. Gordon, Tamar Seideman, Langchi Zhu, Andreas Schroeder