Abstract: Electromechanical device structures are provided, as well as methods for forming them. The device structures incorporate at least a first and second substrate separated by an interface material layer, where the first substrate comprises an anchor material structure and at least one suspended material structure, optionally a spring material structure, and optionally an electrostatic sense electrode. The device structures may be formed by methods that include providing an interface material layer on one or both of the first and second substrates, bonding the interface materials to the opposing first or second substrate or to the other interface material layer, followed by forming the suspended material structure by etching.
Type:
Application
Filed:
December 13, 2019
Publication date:
April 16, 2020
Applicants:
The Government of the United States of America, as represented by the Secretary of the Navy, The Charles Stark Draper Company
Inventors:
Francis J. Kub, Karl D. Hobart, Eugene A. Imhoff, Rachael L. Myers-Ward, Eugene Cook, Jonathan Bernstein, Marc Weinberg