Abstract: In a displacement compensation control method and module for an object mounted movably on a driving rod unit and movable between first and second positions relative to the driving rod unit during processing, a detecting unit determines a displacement amount of a free end of the driving rod unit from a reference position in an axial direction of the driving rod unit as a result of thermal deformation of the driving rod unit during high-speed rotation. A control unit controls the driving rod unit to rotate based on the displacement amount so that the object moves between first and second compensation positions relative to the driving rod unit. A distance between the first position and the first compensation position, and a distance between the second position and the second compensation position are equal to the displacement amount.