Patents Assigned to The Govt. of the United States of America, as represented by the Secretary of the Navy
  • GRAY-TONE LITHOGRAPHY USING OPTICAL DIFFUSERS
    Publication number: 20090092934
    Abstract: A method of: directing an exposing light through an optical diffuser; directing the diffused light though a photomask having transparent areas corresponding to a gray-tone pattern; directing the masked light onto a photoresist material on a substrate; developing the photoresist to produce a three dimensional structure in the photoresist.
    Type: Application
    Filed: August 21, 2008
    Publication date: April 9, 2009
    Applicant: The Govt. of the United States of America, as represented by the Secretary of the Navy
    Inventors: Marc Christophersen, Bernard Phlips