Abstract: An optical probe is used in a near-field effect microscope for performing topographical observation and physical property measurement on a surface of a sample. The optical probe comprises an optical resonator having an optical fiber having at least one microscopic projection composed of a dielectric material disposed at an end portion of the optical fiber for transmitting light.
Type:
Grant
Filed:
April 22, 1998
Date of Patent:
September 19, 2000
Assignees:
The Head of Agency of Industrial Science and Technology, Seiko Instruments Inc.