Patents Assigned to The Institute of Microelectronics of Chinese Academy of Sciences
  • Patent number: 10176287
    Abstract: The invention discloses an STI stress effect modeling method and device of an MOS device, and belongs to the technical field of parameter extraction modeling of devices. The method comprises the following steps: introducing the influence of temperature parameters on the STI stress effect of the MOS device, so as to form a function showing that the STI stress effect of the MOS device changes along with the temperature parameters; extracting the model parameter Model1 of the MOS device at normal temperature; on the basis of the Model1, extracting the parameter Model2 that the STI stress affects the properties of the MOS device at normal temperature; and on the basis of the Model2, extracting fitting parameters of the MOS device in the function so as to acquire final model parameters. The device comprises a first module, a second module, a third module and a fourth module.
    Type: Grant
    Filed: April 25, 2014
    Date of Patent: January 8, 2019
    Assignee: The Institute of Microelectronics of Chinese Academy of Science
    Inventors: Jianhui Bu, Shuzhen Li, Jiajun Luo, Zhengsheng Han
  • Publication number: 20180205015
    Abstract: The present invention discloses a preparation method of a Cu-based resistive random access memory, and a memory. The preparation method includes: performing composition and a chemical combination treatment on a lower copper electrode (10) to generate a compound buffer layer (40), wherein the compound buffer layer (40) is capable of preventing the oxidation of the lower copper electrode (10); depositing a solid electrolyte material (50) on the compound buffer layer (40); and depositing an upper electrode (60) on the solid electrolyte material (50) to form the memory.
    Type: Application
    Filed: April 22, 2016
    Publication date: July 19, 2018
    Applicant: The Institute of Microelectronics of Chinese Academy of Sciences
    Inventors: Hangbing LV, Ming LIU, Qi LIU, Shibing LONG
  • Patent number: 9583621
    Abstract: Provided are a semiconductor device and a method of manufacturing the same. An example device may include: a fin formed on a substrate; a gate stack formed on the substrate and intersecting the fin, wherein the gate stack is isolated from the substrate by an isolation layer, and a Punch-Through Stopper (PTS) formed under the fin, including a first section directly under a portion of the fin where the fin intersects the gate stack and second sections on opposite sides of the first section, wherein the second sections each have a doping concentration lower than that of the first section.
    Type: Grant
    Filed: July 13, 2015
    Date of Patent: February 28, 2017
    Assignee: The Institute of Microelectronics of Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 8871618
    Abstract: An in-situ fabrication method for a silicon solar cell includes the following steps: pretreating a silicon chip; placing the pretreated silicon chip in an implantation chamber of a plasma immersion ion implantation machine; completing the preparation of black silicon via a plasma immersion ion implantation process; making a PN junction and forming a passivation layer on the black silicon; after making the PN junction and forming the passivation layer, removing the black silicon from the plasma immersion ion implantation machine; preparing a metal back electrode on the back of the black silicon; preparing a metal grid on the passivation layer; obtaining a solar cell after encapsulation. Said method enables black silicon preparation, PN junction preparation, and passivation layer formation in-situ, greatly reducing the amount of equipment needed for the preparation of solar cells and the preparation cost. In addition, the method is simple and easy to control.
    Type: Grant
    Filed: September 8, 2010
    Date of Patent: October 28, 2014
    Assignee: The Institute of Microelectronics of Chinese Academy of Sciences
    Inventors: Yang Xia, Bangwu Liu, Chaobo Li, Jie Liu, Minggang Wang, Yongtao Li
  • Patent number: 8703591
    Abstract: A method for fabricating black silicon by using plasma immersion ion implantation is provided, which includes: putting a silicon wafer into a chamber of a black silicon fabrication apparatus; adjusting processing parameters of the black silicon fabrication apparatus to preset scales; generating plasmas in the chamber of the black silicon fabrication apparatus; implanting reactive ions among the plasmas into the silicon wafer, and forming the black silicon by means of the reaction of the reactive ions and the silicon wafer. The method can form the black silicon which has a strong light absorption property and is sensitive to light, and has advantages of high productivity, low cost and simple production process.
    Type: Grant
    Filed: July 26, 2010
    Date of Patent: April 22, 2014
    Assignee: The Institute of Microelectronics of Chinese Academy of Sciences
    Inventors: Yang Xia, Bangwu Liu, Chaobo Li, Jie Liu, Minggang Wang, Yongtao Li
  • Publication number: 20130072007
    Abstract: A method for fabricating black silicon by using plasma immersion ion implantation is provided, which includes: putting a silicon wafer into a chamber of a black silicon fabrication apparatus; adjusting processing parameters of the black silicon fabrication apparatus to preset scales; generating plasmas in the chamber of the black silicon fabrication apparatus; implanting reactive ions among the plasmas into the silicon wafer, and forming the black silicon by means of the reaction of the reactive ions and the silicon wafer. The method can form the black silicon which has a strong light absorption property and is sensitive to light, and has advantages of high productivity, low cost and simple production process.
    Type: Application
    Filed: July 26, 2010
    Publication date: March 21, 2013
    Applicant: The Institute of Microelectronics of Chinese Academy of Sciences
    Inventors: Yang Xia, Bangwu Liu, Chaobo Li, Jie Liu, Minggang Wang, Yongtao Li
  • Publication number: 20130071965
    Abstract: An in-situ fabrication method for a silicon solar cell includes the following steps: pretreating a silicon chip; placing the pretreated silicon chip in an implantation chamber of a plasma immersion ion implantation machine; completing the preparation of black silicon via a plasma immersion ion implantation process; making a PN junction and forming a passivation layer on the black silicon; after making the PN junction and forming the passivation layer, removing the black silicon from the plasma immersion ion implantation machine; preparing a metal back electrode on the back of the black silicon; preparing a metal grid on the passivation layer; obtaining a solar cell after encapsulation. Said method enables black silicon preparation, PN junction preparation, and passivation layer formation in-situ, greatly reducing the amount of equipment needed for the preparation of solar cells and the preparation cost. In addition, the method is simple and easy to control.
    Type: Application
    Filed: September 8, 2010
    Publication date: March 21, 2013
    Applicant: The Institute of Microelectronics of Chinese Academy of Sciences
    Inventors: Yang Xia, Bangwu Liu, Chaobo Li, Jie Liu, Minggang Wang, Yongtao Li