Abstract: An ultrahigh vacuum focused ion beam micromilling apparatus and process are isclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters.
Type:
Grant
Filed:
August 1, 1996
Date of Patent:
June 30, 1998
Assignee:
The Regents of the University of California, Ofc. of Technology Transfer