Patents Assigned to The Trustees of Columbia University in HIe City of
  • SYSTEMS AND METHODS FOR HIGH AND ULTRA-HIGH VACUUM PHYSICAL VAPOR DEPOSITION WITH IN-SITU MAGNETIC FIELD
    Publication number: 20150125622
    Abstract: Systems and methods for high and ultra-high vacuum physical vapor deposition with in-situ magnetic field are disclosed herein. An exemplary method for depositing a film in an evacuated vacuum chamber can include introducing a sample into the vacuum chamber. The sample can be rotated. A magnetic field can be applied that rotates synchronously with the rotating sample. Atoms can be deposited onto the sample while the sample is rotating with the magnetic field to deposit a film while the magnetic field induces magnetic anisotropy in the film.
    Type: Application
    Filed: October 1, 2014
    Publication date: May 7, 2015
    Applicant: The Trustees of Columbia University in HIe City of
    Inventors: KENNETH L. SHEPARD, William E. Bailey, Noah Andrew Sturcken, Cheng Cheng, Sioan Zohar