Abstract: A raised on-chip planar inductor. An inductor is fabricated on a substrate. The inductor, except for an anchoring extremity, is lifted from the substrate, preferably by application of a magnetic field to a magnetic layer formed on the inductor. The lifting of the inductor deforms a plastic bending region. After the magnetic field is removed, the inductor remains raised with respect to the substrate.
Type:
Grant
Filed:
May 23, 2002
Date of Patent:
July 26, 2005
Assignee:
The Trustees of the University of Illinois