Abstract: An apparatus for sterilization of objects or materials comprises an enclosure for containing a gaseous atmosphere; an acoustically transparent platform located within the enclosure for supporting the objects or materials to be sterilized; one or more non-contact ultrasound transducers positioned within the enclosure and spaced from the platform; and an electric power amplifier for exciting the one or more transducers.

Abstract: A piezoelectric transducer (10) includes (a) a first gas matrix piezoelectric composite (12) having a side including at least one positive pole (+) and another side including at least one negative pole (?); (b) a second gas matrix piezoelectric composite (14) having a side including at least one positive pole (+) and another side including at least one negative pole (?); and (c) a substrate (28) having a first side (22) and a second side (24), wherein the substrate is positioned between the first gas matrix piezoelectric composite and the second gas matrix piezoelectric composite. Either the first or second gas matrix piezoelectric composite may include a plurality of piezoelectric rods (15), wherein each piezoelectric rod includes at least one positive pole (16) end and at least one negative pole end (18).

Abstract: Apparatus for determining the speed of sound through a specimen comprises an ultrasound sending transducer, an ultrasound receiving transducer, a pair of laser distance sensors, a display device, a controller in communication with the ultrasound sending transducer, the ultrasound receiving transducer and the pair of laser distance sensors and the display device. The ultrasound sending transducer and one laser distance sensor are supported with a transducer surface in a first plane. The ultrasound receiving transducer and one last distance sensor are supported with a transducer surface in a second plane parallel with the first plane. A support for a specimen is provided between the first and second planes. The controller is programmed for gathering data from the ultrasound transducers and the laser distance sensors for calculating the speed of ultrasound in the specimen and displaying the results.

Abstract: A method of characterizing the surface of a CMP pad by directing an ultrasound pulse at the surface from an ultrasound transducer that is not in contact with the surface and observing the frequency spectrum of the reflected pulse which is indicative of properties of the surface.

Abstract: A piezoelectric transducer (10) includes (a) a first gas matrix piezoelectric composite (12) having a side including at least one positive pole (+) and another side including at least one negative pole (?); (b) a second gas matrix piezoelectric composite (14) having a side including at least one positive pole (+) and another side including at least one negative pole (?); and (c) a substrate (28) having a first side (22) and a second side (24), wherein the substrate is positioned between the first gas matrix piezoelectric composite and the second gas matrix piezoelectric composite. Either the first or second gas matrix piezoelectric composite may include a plurality of piezoelectric rods (15), wherein each piezoelectric rod includes at least one positive pole (16) end and at least one negative pole end (18).

Abstract: An ultrasonic CMP polishing pad analyzer is disclosed. The analyzer provides a manufacturer or other user an ability to inspect a CMP polishing pad without removing the pad from the CMP machine by creating and displaying a topographical image of an in-service polishing pad. The analyzer includes an ultrasonic transducer and an analyzer body mounted to the CMP machine such that the ultrasonic transducer is positioned to receive reflected ultrasonic signals from a surface of the polishing pad.

Abstract: An ultrasonic CMP polishing pad analyzer is disclosed. The analyzer provides a manufacturer or other user an ability to inspect a CMP polishing pad without removing the pad from the CMP machine by creating and displaying a topographical image of an in-service polishing pad. The analyzer includes an ultrasonic transducer and an analyzer body mounted to the CMP machine such that the ultrasonic transducer is positioned to receive reflected ultrasonic signals from a surface of the polishing pad.

Abstract: Method of making a gas matrix composite ultrasound transducer comprises aligning piezoelectric rods or fibers substantially parallel to each other on an adhesive side of a plurality of curable adhesive-faced sheets, stacking the sheets so as to maintain the gaps between the rods or fibers, curing the adhesive, cutting the cured structure perpendicular to the rods or fibers into narrow slices, and applying a conductive layer to each cut face to form electrical contacts with both ends of the rods or fibers.

Abstract: A piezoelectric transducer comprises a piezoelectric layer and an adjacent layer of an acoustic impedance matching material having a plane face comprising a homogenous matrix material with embedded fibers, clusters of fibers, or rods of another material oriented perpendicular to the plane face.