Abstract: A method of fabricating metallic Cu nanowires with lengths up to about 25 ?m and diameters in a range 20-100 nm, or greater if desired. Vertically oriented or laterally oriented copper oxide structures (CuO and/or Cu2O) are grown on a Cu substrate. The copper oxide structures are reduced with 99+ percent H or H2, and in this reduction process the lengths decrease (to no more than about 25 ?m), the density of surviving nanostructures on a substrate decreases, and the diameters of the surviving nanostructures have a range, of about 20-100 nm. The resulting nanowires are substantially pure Cu and can be oriented laterally (for local or global interconnects) or can be oriented vertically (for standard vertical interconnects).
Type:
Grant
Filed:
May 31, 2012
Date of Patent:
September 16, 2014
Assignee:
The United Stated of America as Represented by the Administrator of the National Aeronautics & Space Administration (NASA)