Abstract: Scanning mechanisms that have application in confocal imaging use electromagnetic actuation to move elements in an optical system. An objective lens mounted to a flexure comprising a magnetic material is actuated in the axial direction by an electromagnet coil. An optical path may pass through the coil. Scanning in transverse directions may be provided using magnetically actuated flexible beams which move the tip of an optical fiber or other pinhole in one or more transverse directions. Actuators may be actuated using driving currents that include an AC component and a DC bias component. The scanning mechanisms may be miniaturized and may be constructed to provide real-time imaging.

Abstract: An apparatus and method for using &agr;-particle energy loss to measure the thickness and stoichiometry of films grown by molecular beam epitaxy and other methods. The apparatus for measuring the thickness of films grown on a substrate in a growth chamber, comprises a protective housing having an aperture opening into the growth chamber, a solid state detector disposed in the protective housing, a shutter for opening and closing the aperture, a shield disposed in the housing between the aperture and the solid state detector for shielding the detector, and a calibration source disposed between the shield and the detector for calibrating the measurements made by the detector. A second calibration source disposed between the shutter and the shield, for measuring deposition on the shield.